Package-in-Package Hybrid Bonding for Compact Multi-Die Stacking

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Solution Overview

Problem

The increasing complexity of integrated circuit packages requires innovative methods to efficiently bond multiple device dies within a single package to enhance functionality and reduce manufacturing costs while optimizing device performance.

Innovation Solution

The method involves forming a package by bonding device dies to a wafer through hybrid bonding, followed by singulation and further integration of additional device dies, using techniques such as metal-to-metal and dielectric-to-dielectric bonding, and forming through-vias and redistribution layers to create a stacked package structure that reduces footprint and improves signal transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple device dies are bonded to the same device die to form a system, then device functionality and performance are improved, but package complexity increases

Engineering Contradiction:
Improvedevice functionalityVSAvoidpackage complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements package-in-package formation where a first package containing multiple device dies is bonded to a second device die, creating a nested hierarchical structure. This allows multiple functional units to be integrated while maintaining organized complexity through structured nesting rather than random integration.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The system is divided into separate functional packages (first package with processing dies, second package with memory dies) that are then integrated. This segmentation allows each package to be optimized independently for its specific function while reducing overall system complexity through modular design.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If more device dies are packaged in the same package, then manufacturing cost is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvemanufacturing costVSAvoidbonding precision
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

Multiple device dies are bonded to form complete functional packages before the final integration step. This preliminary packaging allows for pre-optimized bonding processes and quality control at the package level, reducing the precision requirements for the final system-level integration.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The nested package structure enables hierarchical manufacturing where smaller packages are formed and tested independently, then integrated into the final system. This reduces manufacturing precision requirements by breaking down the complex multi-die bonding into manageable sequential steps.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Speed

If device dies are directly bonded together, then signal transmission is improved, but device heat management becomes more difficult

Engineering Contradiction:
Improvesignal transmissionVSAvoidheat management
Core Design Contradiction:
SpeedVSTemperature

Solution Approach 1:

Heat management is extracted as a separate concern from signal transmission by incorporating dedicated thermal management structures (heat sinks, thermal vias, heat spreaders) within each package. This allows direct die-to-die bonding for optimal signal transmission while simultaneously addressing heat dissipation through specialized thermal pathways.

Inventive Principle:
Principle #2Taking out (Extraction)

4Area of stationary object

If package structure is optimized for compactness, then footprint is reduced, but device die placement flexibility decreases

Engineering Contradiction:
Improvepackage footprintVSAvoiddie placement flexibility
Core Design Contradiction:
Area of stationary objectVSAdaptability or versatility

Solution Approach 1:

The patent transitions from two-dimensional planar packaging to three-dimensional stacked packaging with multiple tiers. Device dies are arranged in vertical stacks with different functional packages at different heights, connected through vertical interconnects. This dimensional change dramatically reduces footprint while providing extensive flexibility in die placement and interconnection routing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the creation of compact, high-performance packages with improved signal transmission and reduced manufacturing costs by allowing direct connections between device dies, eliminating the need for additional carriers and optimizing the placement of computing and application dies.

Implementation Method 1

bonding device dies to a wafer through hybrid bonding

Methodology Applied
Scientific EffectMetal-to-metal bonding: Welding

Implementation Method 2

metal-to-metal and dielectric-to-dielectric bonding

Methodology Applied
Scientific EffectDielectric-to-dielectric bonding: Adhesive

Implementation Method 3

forming through-vias and redistribution layers to create a stacked package structure that reduces footprint and improves signal transmission

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS20230387082A1System Formed Through Package-In-Package Formation
Publication Date: 2023.11.30 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20230387082A1 patent drawing
  • US20230387082A1 patent drawing
  • US20230387082A1 patent drawing

AI summary

A package includes a first device die, and a second device die bonded to the first device die through hybrid bonding. The second device die is larger than the first device die. A first isolation region encapsulates the first device die therein. The first device die, the second device die, and the first isolation region form parts of a first package. A third device die is bonded to the first package through hybrid bonding. The third device die is larger than the first package. A second isolation region encapsulates the first package therein. The first package, the third device die, and the second isolation region form parts of a second package.