3D Package Structure with Embedded Inductor for Footprint Reduction

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current packaging techniques are inadequate for efficiently integrating smaller and more compact electronic devices and semiconductor dies, requiring innovative methods to achieve smaller form factors and improved electrical performance.

Innovation Solution

The method involves using a carrier with a material layer, forming conductive patterns and through interlayer vias, and integrating inductor structures above the chip to reduce footprint and enhance electrical connectivity, utilizing redistribution layers and molding compounds to create compact 3D package structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional packaging techniques are used, then manufacturing simplicity is maintained, but device size and compactness cannot be sufficiently reduced

Engineering Contradiction:
Improvepackage sizeVSAvoidpackaging structure complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The patent transitions from planar 2D packaging to three-dimensional 3D packaging by stacking multiple layers (substrate, first molding compound, second molding compound) vertically. This dimensional change enables compactness in the Z-direction while maintaining electrical connectivity through through-mold vias that penetrate multiple layers, effectively reducing the package footprint without proportionally increasing complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nesting by placing the chip within the first molding compound, which is itself embedded in the second molding compound. The inductor structure is nested above the chip and electrically connected through vias. This nested arrangement maximizes space utilization and achieves compact packaging by embedding components within each other rather than placing them side-by-side.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Area of moving object

If component density is increased to reduce footprint, then area is reduced, but electrical performance and power integrity deteriorate

Engineering Contradiction:
Improvepackage footprintVSAvoidelectrical performance
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The patent applies local quality by providing dedicated inductor structures positioned directly above specific chip regions, with through-mold vias creating localized electrical pathways. This localized approach maintains high current density and low inductance in critical areas while reducing overall footprint, thereby preserving electrical performance despite increased component density.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent moves electrical connections from the planar XY-plane to the vertical Z-dimension through through-mold vias that penetrate multiple molding compound layers. This vertical connectivity reduces the horizontal footprint required for electrical paths while maintaining effective electrical performance by shortening current paths and reducing parasitic inductance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Volume of moving object

If 3D integration is implemented to achieve compactness, then volume is reduced, but manufacturing complexity increases

Engineering Contradiction:
Improvepackage volumeVSAvoidfabrication complexity
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The patent applies preliminary action by forming through-mold vias and inductor structures in the first molding compound before applying the second molding compound. This sequential approach simplifies manufacturing by completing complex via formation and inductor fabrication early in the process while the substrate is accessible, rather than attempting to create these features after final packaging.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent segments the packaging process into distinct stages: forming the first molding compound with embedded vias and inductors, then applying the second molding compound. This segmentation allows each manufacturing step to be optimized independently, reducing overall fabrication complexity despite the 3D integrated structure.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11335767B2Package structure and method of fabricating the same
Publication Date: 2022.05.17 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11335767B2 patent drawing
  • US11335767B2 patent drawing
  • US11335767B2 patent drawing

AI summary

A package structure has a chip, a molding compound encapsulating the chip and an inductor structure disposed above the chip. A vertical projection of the inductor structure at least partially overlaps with a vertical projection of the chip.