Package Integrated Synthetic Jet for Micro-Scale Cooling

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Solution Overview

Problem

Conventional fans and blowers are inefficient at small scales, such as millimeters, and their manufacturing is time-consuming and expensive, necessitating a cost-effective and rapid method for delivering large flow rates for small-scale applications like cooling electronic devices and air quality monitoring.

Innovation Solution

A synthetic jet device is fabricated using package substrate technology, featuring a vibrating conductive membrane driven electromagnetically, which creates controlled airflow by expelling air puffs that entrain surrounding air, providing a cost-effective and efficient solution for small-scale airflow delivery.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional fans and blowers are used for small-scale airflow delivery, then manufacturing precision and reliability can be maintained, but manufacturing cost and time increase significantly

Engineering Contradiction:
Improvemanufacturing cost and timeVSAvoidairflow delivery efficiency
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent replaces conventional mechanical fans and blowers with an electromagnetic actuation system. A flexible membrane is driven by electromagnetic forces (via coils and permanent magnets) to generate airflow, eliminating the need for traditional mechanical rotating components and significantly reducing manufacturing complexity and cost while maintaining effectiveness at millimeter scale

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the operating parameters by using flexible membranes with specific material properties (electroactive polymer or composite materials) that can be actuated electromagnetically at millimeter scales. This parameter change enables efficient airflow generation at small scales where conventional fans become ineffective

Inventive Principle:
Principle #35Parameter changes

2Length of moving object

If fans and blowers are scaled down to millimeter size, then device size is reduced, but airflow delivery efficiency deteriorates

Engineering Contradiction:
Improvedevice sizeVSAvoidairflow delivery efficiency
Core Design Contradiction:
Length of moving objectVSProductivity

Solution Approach 1:

The flexible membrane is actuated to vibrate or oscillate at controlled frequencies using electromagnetic forces. This vibration generates periodic airflow that is highly effective at millimeter scales, allowing small device size to maintain or even enhance airflow delivery efficiency through resonant and pulsating flow mechanisms

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The electromagnetic actuation system drives the membrane to perform periodic motion, creating pulsed airflow that is more efficient than continuous flow at small scales. The periodic expansion and contraction of the chamber volume generates controlled air puffs that maintain high delivery efficiency despite the reduced device size

Inventive Principle:
Principle #19Periodic action

3Manufacturing precision

If silicon micromachining is used to fabricate the jet device, then manufacturing precision is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improvefabrication precisionVSAvoidmanufacturing complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The flexible membrane serves multiple functions: it acts as the moving component for airflow generation, the structural element defining the chamber volume, and the actuated surface for electromagnetic force application. This multi-functionality reduces the number of separate components needed, simplifying manufacturing while maintaining precision through standard flexible circuit and MEMS fabrication techniques

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines the membrane, electromagnetic coils, and permanent magnets into an integrated structure where the membrane is formed as part of the flexible circuit substrate. This merging of components into a single fabricable unit reduces manufacturing complexity while maintaining the precision needed for millimeter-scale airflow control

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The synthetic jet device effectively delivers controlled airflow for cooling and sensing applications, enhancing cooling capacity and air quality monitoring while reducing manufacturing costs and complexity compared to silicon micromachining methods.

Implementation Method 1

A permanent magnet is below the bottom cavity

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Implementation Method 2

An electromagnet is used to vibrate the membrane and to create an air flow

Methodology Applied
Scientific EffectElectromagnetic actuation: Electromagnetic Propulsion

Implementation Method 3

an electromagnetically driven vibrating membrane of conductive material

Methodology Applied
Scientific EffectLorentz force: Lorentz Force

Implementation Method 4

creates controlled airflow by expelling air puffs that entrain surrounding air

Methodology Applied
Scientific EffectAir entrainment: Entrainment

Data Source

PatentEP3302961B1Package integrated synthetic jet device
Publication Date: 2020.03.25 INTEL CORP
  • EP3302961B1 patent drawingFigure 1A
  • EP3302961B1 patent drawingFigure 1B
  • EP3302961B1 patent drawingFigure 2

AI summary

Embodiments include a synthetic jet device formed within layers of a package substrate, such as to provide a controlled airflow for sensing or cooling applications. The jet device includes an electromagnetically driven vibrating membrane of conductive material between a top and bottom cavity. A top lid with an opening covers the top cavity, and a permanent magnet is below the bottom cavity. An alternating current signal conducted through the membrane causes the membrane to vibrate in the presence of a magnetic field caused by the permanent magnet. By being manufactured with package forming processes, the jet (1) is manufactured more cost-effectively than by using silicon chip or wafer processing; (2) is easily integrated as part of and with the other layers of a package substrate; and (3) can be driven by a chip mounted on the package. Embodiments also include systems having and processes for forming the jet.