Semiconductor Package Lid Structure for Precise Device Gap Control

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Solution Overview

Problem

Conventional semiconductor package manufacturing methods fail to precisely control the gap size between the device and the molding material, leading to inaccuracies in parameters such as air flow resistance, heat dissipation, and mechanical durability, especially for optical devices.

Innovation Solution

Incorporating metal components like studs or bumps between the device and the lid in the package structure, which allows for precise control of the gap width by referencing the standard deviation of the metal component's height, reducing the impact of molding material tolerances and enabling more accurate gap size determination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional molding material is used to package semiconductor devices, then the packaging process is simple and fast, but the gap size between device and molding material cannot be precisely controlled

Engineering Contradiction:
Improvegap size controlVSAvoidpackage structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

A lid is introduced as an intermediary component between the molding material and the device. The lid includes a cavity that receives the device and a bottom surface that forms a controlled gap with the device top surface. This mediator enables precise gap size control through the cavity design while keeping the molding material's role simple.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The package structure is segmented into distinct functional zones: the molding material provides overall protection, the lid cavity provides precise gap control, and the bottom surface of the lid provides the controlled interface. This segmentation allows each component to optimize its function without compromising others.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If conventional molding methods are used, then manufacturing is efficient, but statistical tolerances accumulate leading to incorrect parameters

Engineering Contradiction:
Improveparameter precisionVSAvoidmanufacturing efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The lid cavity is pre-formed with precise dimensions before device assembly. The gap size is determined in advance by the cavity design rather than by post-assembly adjustments or relying on tolerance stacks. This preliminary action ensures parameter precision is built into the structure itself.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The gap size parameter is controlled by changing the cavity design parameters of the lid rather than relying on molding material shrinkage or compression parameters. This shifts the control mechanism to a more predictable and precise geometric parameter.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If gap size is not precisely controlled, then manufacturing is simpler, but mechanical durability and performance of optical devices suffer

Engineering Contradiction:
Improvemechanical durabilityVSAvoidpackage structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The lid acts as a mediator that provides the precisely controlled gap necessary for optical device performance while protecting the device from direct contact with the molding material. This intermediary structure ensures mechanical durability through proper spacing and stress distribution.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS12002780B2Package structure including a base and a lid disposed over the base and method of forming the package structure
Publication Date: 2024.06.04 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12002780B2 patent drawing
  • US12002780B2 patent drawing
  • US12002780B2 patent drawing

AI summary

The present disclosure provides a package structure. The package structure includes a base, a device disposed on the base, a lid disposed over the base and the device and spaced apart from the device, and a first metal component disposed between the device and the lid, wherein the first metal component contacts the device and the lid. The present disclosure also provides a method for forming a package structure.