Package-on-Package Structure with Embedded Die and Protected Conductive Posts

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Solution Overview

Problem

Current semiconductor packaging technologies face challenges in efficiently stacking and connecting multiple semiconductor dies to enhance performance and efficiency, particularly in achieving reliable electrical connections and protection of conductive posts within a compact package structure.

Innovation Solution

The method involves forming a stacked die unit by bonding a second semiconductor die onto a first semiconductor die using fusion bonding or a die attach film, embedding it within a protective layer, and then encapsulating with an insulating material, followed by forming a redistribution layer to connect the conductive posts and ensure electrical connectivity between dies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If multiple semiconductor dies are stacked to enhance performance, then communication paths between dies are shortened, but reliable electrical connections and protection of conductive posts become more difficult to achieve

Engineering Contradiction:
Improvecommunication path lengthVSAvoidelectrical connection reliability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent embeds conductive posts within protective layers and encapsulates them with insulating material, creating a nested structure where the conductive posts are protected by multiple concentric layers (protective layer, insulating encapsulant, redistribution layer) while maintaining their electrical connectivity function

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent introduces intermediate protective layers and insulating encapsulants between the conductive posts and the external environment, acting as mediators that protect the conductive posts while allowing electrical connections to be established through the redistribution layer

Inventive Principle:
Principle #24Intermediary (Mediator)

2Speed

If multiple semiconductor dies are stacked to enhance performance, then communication paths between dies are shortened, but protection of conductive posts becomes more difficult

Engineering Contradiction:
Improvecommunication path lengthVSAvoidprotection of conductive posts
Core Design Contradiction:
SpeedVSObject-affected harmful factors

Solution Approach 1:

The conductive posts are nested within multiple protective layers including the protective layer and insulating encapsulant, creating a nested structure that shields the conductive posts from environmental harmful factors while maintaining their electrical function

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent applies protective layers and insulating encapsulants beforehand to cushion and protect the conductive posts from potential harmful factors before they can cause damage, ensuring the reliability of the stacked die structure

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

3Reliability

If semiconductor dies are bonded using fusion bonding or die attach film, then electrical connections between dies are established, but device complexity increases

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidbonding process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines the bonding process with subsequent protective layer formation and encapsulation steps, merging multiple operations into an integrated process flow that reduces overall device complexity while maintaining reliable electrical connections

Inventive Principle:
Principle #5Merging (Combining)

4Object-affected harmful factors

If protective layers and insulating encapsulants are added to protect conductive posts, then protection is enhanced, but manufacturing complexity increases

Engineering Contradiction:
Improveprotection of conductive postsVSAvoidmanufacturing process simplicity
Core Design Contradiction:
Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The patent merges the formation of protective layers, insulating encapsulants, and redistribution layers into an integrated manufacturing process, where multiple protective functions are combined in a single streamlined process flow, making manufacturing easier while maintaining protection

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for improved performance and efficiency by shortening communication paths between semiconductor dies, enhancing protection, and enabling more compact and reliable package structures, such as package-on-package configurations.

Implementation Method 1

bonding a second semiconductor die onto a first semiconductor die using fusion bonding or a die attach film

Methodology Applied
Scientific EffectFusion bonding: Welding

Data Source

PatentUS10867966B2Package structure, package-on-package structure and method of fabricating the same
Publication Date: 2020.12.15 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10867966B2 patent drawing
  • US10867966B2 patent drawing
  • US10867966B2 patent drawing

AI summary

A package structure includes a first semiconductor die, a second semiconductor die, an insulating encapsulant and a redistribution layer. The first semiconductor die has first conductive posts and a first protection layer laterally surrounding the first conductive posts. The second semiconductor die is embedded in the first protection layer and surrounded by the first conductive posts of the first semiconductor die, wherein the second semiconductor die includes second conductive posts. The insulating encapsulant is encapsulating the first semiconductor die and the second semiconductor die. The redistribution layer is disposed on the insulating encapsulant and connected with the first conductive posts and the second conductive posts, wherein the first semiconductor die is electrically connected with the second semiconductor die through the first conductive posts, the redistribution layer and the second conductive posts.