Semiconductor Package TIM Structure for Heat and Delamination

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Solution Overview

Problem

Integrated circuit packages experience warpage and increased heat generation due to material differences and power density requirements, leading to stress and delamination issues.

Innovation Solution

The use of multiple Thermal Interface Materials (TIMs) with varying materials to distribute stress and maintain high thermal dissipation, combined with a phase-change material and liquid metal TIM for enhanced thermal conductivity and delamination resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple Thermal Interface Materials (TIMs) with varying materials are used, then stress distribution and delamination resistance are improved, but device complexity increases

Engineering Contradiction:
Improvedelamination resistanceVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent divides the thermal interface material into multiple discrete TIM layers with different material compositions. Each TIM layer is positioned between specific package components to address localized stress and thermal requirements, transforming a single homogeneous material into a segmented multi-material structure that reduces delamination risk while managing complexity through functional zoning

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs composite material construction by combining multiple TIM materials with different properties (thermal conductivity, compliance, CTE) into a layered thermal interface system. This composite approach allows optimization of both stress distribution and heat dissipation by selecting materials whose properties complement each other, achieving enhanced reliability through material diversity rather than complexity

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If package size increases to increase functionality and integration level, then device functionality is improved, but warpage becomes more severe

Engineering Contradiction:
ImprovefunctionalityVSAvoidwarpage
Core Design Contradiction:
Adaptability or versatilityVSShape

Solution Approach 1:

The patent applies local quality by positioning specific TIM materials at critical interfaces within the package structure where stress concentration occurs. Rather than uniformly treating the entire package, the solution targets specific locations (between die and substrate, between interposers and substrates) with materials optimized for local stress management, allowing large package sizes to be maintained without excessive warpage

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes material parameters (thermal conductivity, compliance, coefficient of thermal expansion) of the TIM layers to compensate for warpage in larger packages. By selecting TIM materials with appropriate CTE matching and compliance properties, the system accommodates thermal expansion differences in enlarged packages, maintaining planarity and reducing warpage while preserving enhanced functionality

Inventive Principle:
Principle #35Parameter changes

3Power

If power density requirements increase to meet performance demands, then device performance is improved, but heat generation increases

Engineering Contradiction:
Improvepower densityVSAvoidheat generation
Core Design Contradiction:
PowerVSTemperature

Solution Approach 1:

The patent uses composite TIM materials with hierarchically structured properties: high thermal conductivity materials (such as metal-based TIMs) are positioned at critical heat transfer interfaces, while compliant polymer-based TIMs are used where stress management is prioritized. This composite material strategy enables high power density operation by ensuring efficient heat extraction through strategically selected material properties, preventing excessive temperature rise while maintaining performance

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The TIM layers serve as thermal intermediaries between high-power generating components (die, interposers) and heat dissipation structures (substrates, heat sinks). These intermediary materials facilitate efficient thermal energy transfer from concentrated heat sources to larger heat dissipation areas, managing the temperature increase that results from high power density requirements while preserving device performance

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces delamination risk while maintaining high thermal dissipation, improving the durability and performance of integrated circuit packages under temperature cycles.

Implementation Method 1

the clamping process causes the boundary layer material to change from a solid to a liquid state, so that the boundary layer material spreads to cover the package component and bond to adjacent surfaces

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 2

a metal thermal interface material (TIM) layer surrounded by the boundary structure

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250349670A1Semiconductor Device and Method Forming Same
Publication Date: 2025.11.13 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250349670A1 patent drawing
  • US20250349670A1 patent drawing
  • US20250349670A1 patent drawing

AI summary

Package structures and methods of forming package structures are discussed. A package structure, in accordance with some embodiments, includes a package component with one or more integrated circuits adhered to a package substrate, a hybrid thermal interface material utilizing a combination of polymer based material with high elongation values and metal based material with high thermal conductivity values. The polymer based thermal interface material placed on the edge of the package component contains the metal based thermal interface material in liquid form.