Palladium-Coated Wire Bonding for Corrosion-Resistant Semiconductor Joints

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Solution Overview

Problem

Conventional wire bonding techniques, such as ball bonding, can lead to reliability issues due to corrosion and alloy formation between the wire and the semiconductor chip, and are not suitable for wires with small diameters.

Innovation Solution

A semiconductor device employing wedge bonding with a wire configuration that includes a core conductor and a palladium coating, where the core is separated from the semiconductor chip and lead terminal by the palladium coating, preventing direct contact and corrosion, and allowing bonding without melting, thus enhancing reliability and applicability to both large and small diameter wires.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If ball bonding is used to electrically couple electrodes, then bonding can be achieved, but corrosion and alloy formation occur between the wire and semiconductor chip

Engineering Contradiction:
Improvewire bonding reliabilityVSAvoidcorrosion and alloy formation
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

A palladium coating is applied to the wire surface as an intermediary layer between the wire core and the semiconductor chip electrodes. This palladium layer prevents direct contact between the wire material (such as copper or aluminum) and the chip materials, thereby eliminating corrosion and unwanted alloy formation while maintaining electrical conductivity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The wire structure is designed as a composite material system with a core conductor (providing electrical conductivity) and a palladium coating layer (providing corrosion resistance and preventing alloy formation). This composite structure combines the advantages of different materials to achieve both electrical performance and chemical stability.

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If ball bonding is used for wire bonding, then bonding can be achieved, but it is not suitable for wires with small diameters

Engineering Contradiction:
Improveapplicability to different wire diametersVSAvoidbonding reliability for small diameter wires
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The invention transitions from ball bonding to wedge bonding methodology, changing the bonding process parameters. Wedge bonding uses a wedge-shaped anvil to compress and bond the wire directly without forming a ball, which allows for effective bonding of wires with smaller diameters while maintaining bonding reliability.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If direct contact between wire and electrode is used, then electrical coupling is achieved, but corrosion occurs

Engineering Contradiction:
Improveresistance to corrosionVSAvoidwire structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The palladium coating serves as a protective intermediary layer that maintains direct electrical contact between wire and electrode while preventing corrosive interactions. This thin coating layer adds minimal structural complexity while providing substantial corrosion protection.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The wedge bonding method improves the reliability of the wire bonding process by preventing corrosion and alloy formation, while enabling bonding of wires with small diameters that are not suitable for traditional ball bonding, thus enhancing the semiconductor device's performance and durability.

Implementation Method 1

a second conductor that is provided inside the first conductor and has no contact with the first electrode and the second electrode

Methodology Applied
Scientific EffectPhysical barrier (coating): Coatings

Implementation Method 2

wedge bonding with a wire configuration that includes a core conductor and a palladium coating, where the core is separated from the semiconductor chip and lead terminal by the palladium coating, preventing direct contact and corrosion, and allowing bonding without melting

Methodology Applied
Scientific EffectWedge bonding: Welding

Data Source

PatentUS11749634B2Semiconductor device and wire bonding method
Publication Date: 2023.09.05 KIOXIA CORP
  • US11749634B2 patent drawing
  • US11749634B2 patent drawing
  • US11749634B2 patent drawing

AI summary

According to one embodiment, a semiconductor device includes a first electrode, a second electrode, and a wire extending between the first electrode and the second electrode. The wire includes a first conductor in contact with the first electrode and the second electrode, and a second conductor that is provided inside the first conductor and has no contact with the first electrode and the second electrode.