Panel Transistor Auxiliary Electrodes and Capacitor Plates
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Solution Overview
Problem
The patterning process for electronic devices, such as display panels, often requires a large number of masks, leading to increased complexity and cost, and can result in patterns with unintended physical properties or defects due to the etching process.
Innovation Solution
A panel design that includes a transistor with an auxiliary source and drain electrode, and a capacitor with plates made of the same material as these electrodes, allowing for a simplified manufacturing process using fewer masks and reducing the channel length of the transistor to enhance electron mobility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a conventional patterning process with multiple masks is used, then the panel can be manufactured with standard design flexibility, but the process complexity and manufacturing cost increase significantly
Solution Approach 1:
The patent merges the formation of auxiliary source/drain electrodes and capacitor plates into a single patterning step. By making these components from the same material and forming them simultaneously, the invention reduces the number of separate deposition and patterning steps required, thereby simplifying the manufacturing process while maintaining design flexibility
Solution Approach 2:
The invention creates a universal electrode material layer that serves multiple functions: forming auxiliary source electrodes, auxiliary drain electrodes, and capacitor plates. This multi-functional approach allows a single material deposition step to create multiple critical components, reducing overall process complexity
2Ease of manufacture
If multiple masks are used in the patterning process, then various pattern configurations can be achieved, but the manufacturing cost increases
Solution Approach 1:
The patent combines the patterning of auxiliary source/drain electrodes and capacitor plates into a single mask step. By using the same material and simultaneous patterning, the invention reduces mask requirements while maintaining the ability to create various pattern configurations through strategic material placement and layer design
3Reliability
If the channel length of the transistor is reduced to enhance electron mobility, then the transistor performance improves, but the manufacturing precision requirements increase
Solution Approach 1:
The auxiliary source and drain electrodes serve a dual function: they provide electrical connection while also defining the channel length through their positioning. This self-defining approach allows the channel length to be determined by the electrode geometry rather than requiring separate precision patterning steps, thereby maintaining electron mobility while reducing manufacturing precision requirements
Data Source
AI summary
A panel comprises a substrate; a transistor disposed on the substrate and including: a source electrode, a drain electrode, a gate electrode, a gate insulation layer, an active layer, an auxiliary source electrode configured to electrically connect one end of the active layer to the source electrode, and an auxiliary drain electrode configured to electrically connect an other end of the active layer to the drain electrode; and a capacitor disposed on the substrate and including a first plate and a second plate. The first plate of the capacitor is made of a same material as the auxiliary source electrode and the auxiliary drain electrode.