Parallel Charged Particle Evaluation System for IC Inspection
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Solution Overview
Problem
Current evaluation systems for integrated circuits, such as scanning electron microscopes, are slow and have large footprints, failing to provide fast and compact solutions for evaluating objects like wafers effectively.
Innovation Solution
A system comprising evaluation units with a chamber, chuck, movement system, and charged particle module for irradiating and detecting particles, along with an object distribution system and controller, allowing parallel evaluation of objects in compact spaces within the evaluation units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If scanning electron microscopes are used for evaluation, then nanometric resolution is achieved, but the system becomes slow and has large footprint
Solution Approach 1:
The system divides the evaluation process into multiple parallel evaluation units, each handling a portion of the manufacturing process evaluation. This segmentation allows simultaneous evaluation of different process stages, increasing overall speed while maintaining the nanometric resolution capability of electron microscopy in each unit.
Solution Approach 2:
The patent transitions from sequential single-unit evaluation to parallel multi-unit evaluation, adding a dimensional aspect of concurrency. Multiple evaluation units operate simultaneously on different process stages, transforming the evaluation architecture from a single-threaded to a multi-threaded system, thereby achieving high speed without sacrificing resolution.
2Measurement precision
If scanning electron microscopes are used for evaluation, then nanometric resolution is achieved, but the system occupies large footprint
Solution Approach 1:
The patent combines multiple evaluation units into a single integrated system with shared infrastructure. By merging common components such as control systems, data processing units, and support infrastructure across multiple evaluation modules, the system achieves compact footprint while maintaining nanometric resolution capabilities in each evaluation unit.
Solution Approach 2:
Each evaluation unit is designed as a universal module capable of evaluating multiple process stages. This multi-functionality reduces the need for specialized equipment for each process stage, thereby minimizing the overall system footprint while maintaining high measurement precision across all evaluation tasks.
3Productivity
If parallel evaluation of multiple objects is implemented, then productivity is improved, but system complexity increases
Solution Approach 1:
The system segments the parallel evaluation process into distinct, modular evaluation units, each handling specific process stages. This segmentation manages complexity by creating independent, manageable modules that can operate in parallel, thereby improving productivity without overwhelming system complexity.
Solution Approach 2:
The patent introduces a central controller as an intermediary that coordinates communication and data flow between multiple evaluation units. This mediator manages the complexity of parallel operations by providing a unified control interface, synchronizing evaluations across units, and aggregating results, thereby enabling high productivity while keeping system complexity manageable through centralized coordination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables fast and efficient evaluation of integrated circuits by distributing objects between evaluation units, achieving high throughput and compact design, thereby overcoming the limitations of existing systems.
Implementation Method 1
a charged particle module that is conFigured to irradiate the object with a charged particle beam, and to detect particles emitted from the object
Data Source
AI summary
A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.