Parallel Confocal System with Relay Lens for Extended Working Distance
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Solution Overview
Problem
Conventional confocal optical systems face challenges in maintaining a sufficient working distance between microlenses and measuring objects, leading to contamination and scratches, and require lengthy scanning processes over large areas, reducing efficiency and increasing system complexity.
Innovation Solution
A multiple parallel confocal system with a relay lens unit and a microlens array, where the back focus is calculated to extend the working distance and allow continuous scanning in a single direction, eliminating the need for physical pinholes and reducing contact risks, and incorporating a telecentric lens and beam splitter for improved focusing and path conversion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional confocal optical system with a microlens is used to focus light onto the sample surface, then the focal length is very short and the working distance is insufficient, but this causes the microlens and sample surface to be brought into contact, leading to contamination and scratches
Solution Approach 1:
A relay lens unit is introduced as an intermediary optical element between the light source and the microlens array. This relay lens unit transforms the incident parallel light into convergent light before it reaches the microlenses, effectively extending the working distance while maintaining the focusing capability. The relay lens unit acts as a mediator that resolves the contradiction between short focal length and contact prevention.
2Object-affected harmful factors
If a separate stage is added to convey the optical system or sample in the z-direction to prevent contact, then the contact problem is solved, but the system configuration becomes complicated and high precision control is required
Solution Approach 1:
The patent replaces the mechanical z-direction conveyance system with an optical solution. Instead of using a separate stage to physically move components to prevent contact, the relay lens unit optically extends the working distance, eliminating the need for complex mechanical positioning systems while maintaining contact prevention.
3Manufacturing precision
If a single beam spot is scanned over the whole measuring area using an actuator, then the measurement is performed, but a long period of time is needed and vibrations are generated reducing system performance
Solution Approach 1:
The patent divides the single beam spot into multiple beam spots arranged in a matrix pattern. Instead of scanning one spot sequentially across the entire measuring area, multiple spots simultaneously cover different regions. This segmentation of the measurement task into parallel operations dramatically reduces scanning time and eliminates the vibrations associated with single-spot sequential scanning.
4Area of stationary object
If multiple optical probes are used to scan the surface, then the scanning area is expanded, but the system still requires repeated movement and stopping of beam spots reducing efficiency
Solution Approach 1:
The patent combines multiple microlenses into a single microlens array component, merging their functions into one integrated unit. This allows all multiple beam spots to be generated and positioned simultaneously without repeated movement and stopping. The merging of multiple optical probes into a unified array structure maintains expanded measuring area while significantly improving scanning efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system extends the working distance, prevents contamination and scratches, and enables rapid scanning of large areas by continuous movement of the multiple optical probes, enhancing measurement efficiency and simplifying system configuration.
Implementation Method 1
a relay lens unit (102) having one or more lenses for focusing the light irradiated from the light source
Implementation Method 2
a multiple optical probe (103) having a microlens array on which a plurality of microlenses (104) is arranged, the microlenses into which the focused light through the relay lens unit is incident
Implementation Method 3
a photo detector (106) for detecting the incident light reflected from the measuring object and passed through the microlenses and the relay lens unit
Data Source
AI summary
The present invention relates to a multiple parallel confocal system including: a light source for irradiating light; a relay lens unit through which the light traveling toward a measuring object or the light reflected from the measuring object is passed, the relay lens unit having one or more lens for focusing the light irradiated from the light source; a multiple optical probe having a microlens array on which a plurality of microlenses is arranged, the microlenses into which the focused light through the relay lens unit is incident; and a photo detector for detecting the incident light reflected from the measuring object and passed through the microlenses and the relay lens unit.