Parallel Dipole Line Photo-Hall Stage for Thermal-Gradient Testing
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Solution Overview
Problem
Existing semiconductor testing systems lack the sensitivity needed for comprehensive characterization of charge carrier properties in semiconductor devices, particularly as device sizes decrease and material types vary, necessitating improved measurement techniques.
Innovation Solution
A temperature-controlled photo-Hall system utilizing a magnetic field generator, electric field generator, and light source, combined with a temperature control assembly that creates a temperature gradient across the device under test, employing parallel dipole line magnets and individually controlled temperature elements to enhance sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional semiconductor testing systems are used, then basic charge carrier measurement is possible, but sensitivity is insufficient for comprehensive characterization as device size decreases
Solution Approach 1:
The patent combines multiple measurement capabilities (Hall effect, Seebeck effect, Nernst effect, conductivity measurement) and multiple excitation modes (magnetic field, electric field, temperature gradient, optical excitation) into a single integrated testing system. This merging of functions increases measurement precision for comprehensive charge carrier characterization while managing system complexity through unified design
Solution Approach 2:
The testing system is designed with multi-functionality to perform various semiconductor characterization measurements using the same physical platform. The system can measure different charge carrier properties by varying the excitation modes and measurement configurations, providing universal capability for comprehensive device characterization without requiring separate specialized systems
2Productivity
If device size decreases to advance technology nodes, then device integration increases, but measurement sensitivity becomes more difficult to maintain
Solution Approach 1:
The system employs multiple adjustable parameters including variable magnetic field strength, electric field magnitude, temperature gradient magnitude, and optical excitation intensity. By dynamically changing these parameters, the system can enhance the signal strength and measurement sensitivity even as device dimensions decrease, maintaining the ability to detect charge carrier properties in scaled devices
3Adaptability or versatility
If material types vary across semiconductor devices, then application versatility increases, but characterization complexity increases
Solution Approach 1:
The testing system provides universal characterization capability for different semiconductor materials and device types through a unified measurement platform. The system can accommodate various material types (semiconductors, insulators, conductors) and device configurations using the same set of excitation modes and measurement techniques, simplifying the characterization process despite material diversity
Solution Approach 2:
The system features dynamic adjustability in measurement parameters and configurations to adapt to different material types and device structures. The ability to dynamically modify excitation modes, field strengths, and measurement geometries allows the system to optimize characterization for each specific material and device type without requiring fundamental system changes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides enhanced sensitivity for measuring conductivity, Hall effect, Seebeck effect, and Nernst effect, allowing direct determination of the effective mass of majority carriers with improved accuracy and precision.
Implementation Method 1
The Hall effect is based on Lorentz force that deflects the flow of charge carriers under a perpendicular magnetic field
Implementation Method 2
The Hall effect is based on Lorentz force that deflects the flow of charge carriers under a perpendicular magnetic field
Implementation Method 3
The temperature control assembly generates a temperature gradient across the device under test to enable measurements sensitive to thermal gradient conditions
Implementation Method 4
The parallel line dipole photo-Hall system to measure conductivity, Hall effect, Seebeck effect and Nernst effect
Implementation Method 5
The parallel line dipole photo-Hall system to measure conductivity, Hall effect, Seebeck effect and Nernst effect
Implementation Method 6
parallel dipole line photo-Hall system
Implementation Method 7
photons from the light source
Data Source
AI summary
A testing system includes a magnetic field generator, an electric field generator and a light source. A temperature control assembly includes a sample stage which supports a device under test during exposure to a magnetic field generated by the magnetic field generator, an electric field generated by the electric field generator and photons from the light source. The temperature control assembly generates a temperature gradient across the device under test to enable measurements sensitive to thermal gradient conditions.