Parallel Flexure Nano Positioning Stage With Decoupled XY Motion
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Solution Overview
Problem
Existing nano positioning stages with parallel flexure hinge mechanisms are complex in structure, large in area, and have a small moving stage, making them unsuitable for applications requiring a compact design with minimal crosstalk between X and Y axes.
Innovation Solution
A two-degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism, featuring driving systems along the X and Y axes, a moving stage, and a base frame, utilizing piezo actuators, connecting blocks, levers, preloading springs, and connecting hinges to achieve movement decoupling and amplification, with a compact and integrated design that eliminates crosstalk and allows for precise positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a parallel structure is used to eliminate crosstalk between X and Y axes, then movement decoupling is achieved, but the structure becomes complex and the area of hinge mechanism increases
Solution Approach 1:
The patent combines the moving stages for X and Y directions into a single integrated moving stage, merging two separate stages into one. This integration simplifies the overall structure while maintaining the parallel flexure hinge mechanism for movement decoupling, directly addressing the complexity issue without sacrificing reliability
2Reliability
If a parallel structure is used to eliminate crosstalk between X and Y axes, then movement decoupling is achieved, but the area of moving stage decreases
Solution Approach 1:
The patent introduces a vertical dimension by incorporating a lever mechanism that converts horizontal piezo actuator displacement into vertical push rod movement. This dimensional transformation allows the moving stage to achieve larger effective stroke in a compact footprint, effectively increasing the functional area without expanding the physical footprint
3Length of moving object
If piezo actuators with large stroke are used to achieve large moving stage stroke, then the stroke is amplified, but the base frame deforms under driving forces
Solution Approach 1:
The patent implements preloading springs that are pre-compressed to apply continuous preload forces on the piezo actuators and push rods. This preliminary action ensures that the mechanical components remain in a pre-stressed state, compensating for base frame deformations and maintaining positioning accuracy throughout the stroke range
4Volume of moving object
If a compact design is used to reduce volume, then installation convenience is improved, but the moving stage area becomes small
Solution Approach 1:
The patent utilizes the lever mechanism to transform horizontal motion into vertical motion, effectively using the vertical dimension to amplify the functional stroke. This allows the moving stage to maintain a compact horizontal footprint while achieving larger effective movement range through vertical displacement amplification
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a compact, high-precision nano positioning stage with improved static and dynamic consistency, reduced volume, and enhanced installation convenience, capable of handling large strokes in small spaces while maintaining positioning accuracy despite base frame deformations due to driving forces and temperature changes.
Implementation Method 1
each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end
Implementation Method 2
the preloading spring is fixed on the base frame at one end and connected with the lever at the other end
Data Source
AI summary
A two degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism includes two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame, wherein each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end; the lever is connected between the connecting block and the preloading spring, the connecting block is connected with the lever through one of the connecting hinges; the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges.