Parallel-Flow OVJP Depositor for High-Resolution OLED Printing

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Solution Overview

Problem

Existing organic vapor jet printing (OVJP) technologies face challenges in achieving high resolution and efficient material utilization for organic light-emitting diodes (OLEDs), particularly due to issues with overspray and the inability to rapidly start and stop printing, leading to non-uniform feature sizes and reduced material efficiency.

Innovation Solution

The use of Parallel Delivery-Confinement (PDC) depositors, which align delivery and exhaust apertures in a specific configuration to ensure parallel gas flows, minimizing overspray and enhancing material utilization by confining the organic vapor deposition, allowing for higher resolution and uniform feature printing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of substance

If conventional OVJP technologies are used, then printing capability is achieved, but material utilization efficiency is poor due to overspray

Engineering Contradiction:
Improvematerial utilization efficiencyVSAvoidoverspray
Core Design Contradiction:
Loss of substanceVSObject-generated harmful factors

Solution Approach 1:

A confinement gas flow is introduced as an intermediary between the delivery gas jet and the substrate/environment. This confinement gas acts as a mediator that confines the delivery gas and organic vapor, preventing overspray while maintaining efficient material deposition. The confinement gas flow is positioned laterally adjacent to the delivery aperture and directs the vapor stream toward the substrate.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention uses gas flows (pneumatics) to control the deposition process. A delivery gas carries organic vapor through a delivery aperture, while a confinement gas flow is introduced to confine this delivery gas. The pneumatic control of gas flows enables precise manipulation of the vapor stream to eliminate overspray and improve material utilization efficiency.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Manufacturing precision

If conventional OVJP printing is used, then organic films can be deposited, but resolution is limited due to inability to rapidly start and stop printing

Engineering Contradiction:
Improveprinting resolutionVSAvoidprinting speed control
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The printing process utilizes periodic action by rapidly starting and stopping the delivery gas flow in a controlled manner. The confinement gas flow continues to confine the vapor stream during these rapid transitions, enabling precise control over when and where material is deposited. This periodic activation allows for high-resolution printing with the ability to rapidly start and stop feature deposition.

Inventive Principle:
Principle #19Periodic action

3Manufacturing precision

If feature size is reduced for high resolution, then printing precision improves, but feature size uniformity deteriorates

Engineering Contradiction:
Improvefeature size controlVSAvoidfeature size uniformity
Core Design Contradiction:
Manufacturing precisionVSStability of the object's composition

Solution Approach 1:

The invention controls the confinement gas flow rate as a key parameter to maintain feature size uniformity. By optimizing the confinement gas flow rate relative to the delivery gas flow rate, the system maintains stable confinement of the vapor stream even when printing small features. This parameter control ensures that feature sizes remain uniform across different print conditions and locations.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

PDC depositors achieve improved material utilization efficiency and reduced feature size variability, enabling high-resolution printing of OLEDs with increased operational flexibility and precision, even at varying fly heights.

Implementation Method 1

Parallel Delivery-Confinement (PDC) depositors, which align delivery and exhaust apertures in a specific configuration to ensure parallel gas flows

Methodology Applied
Scientific EffectGas flow:

Implementation Method 2

confining the organic vapor deposition

Methodology Applied
Scientific EffectVapor deposition: Deposition (physical)

Implementation Method 3

align delivery and exhaust apertures in a specific configuration to ensure parallel gas flows, minimizing overspray

Methodology Applied
Scientific EffectGas flow:

Data Source

PatentEP3406755B1Generalized organic vapor jet depositor capable of high resolution printing and method for OVJP printing
Publication Date: 2025.07.02 UNIVERSAL DISPLAY CORP
  • EP3406755B1 patent drawingFigure 1
  • EP3406755B1 patent drawingFigure 2~3
  • EP3406755B1 patent drawingFigure 4

AI summary

OVJP depositors and techniques for using the same are provided, in which the in-substrate plane velocity of the delivery and confinement flows are both nonzero and parallel to each other across the boundary between the two. These configurations provide improved material utilization efficiency and relaxed fly height tolerances, while achieving acceptable printing resolution and feature uniformity.