Virtual Metrology with Parallel Network Sections for Inspection Accuracy
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Solution Overview
Problem
Existing virtual metrology techniques face challenges in achieving highly accurate inspection of manufacturing processes due to limitations in data processing and analysis methods.
Innovation Solution
A virtual metrology apparatus and method utilizing a plurality of network sections trained through machine learning to process time series data, allowing for detailed analysis of manufacturing processes by dividing and consolidating data based on different criteria or algorithms, thereby enhancing inference accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single network section is used to process time series data for virtual metrology, then the device complexity is low, but the measurement precision and manufacturing precision are insufficient
Solution Approach 1:
The patent divides the processing system into multiple network sections, where each network section processes time series data using different criteria or algorithms. This segmentation allows each section to specialize in extracting specific features from the data, thereby improving overall inspection accuracy while maintaining manageable complexity through modular design
Solution Approach 2:
The patent introduces an additional dimension of processing by applying multiple different criteria and algorithms across parallel network sections. This multi-dimensional approach enables comprehensive analysis of time series data from various perspectives simultaneously, enhancing measurement precision without simply increasing the complexity of a single processing path
2Manufacturing precision
If multiple network sections with different criteria are used to process time series data, then the manufacturing precision improves, but the device complexity increases
Solution Approach 1:
The patent segments the data processing task into multiple network sections, each handling specific aspects of time series data with dedicated criteria or algorithms. This segmentation improves manufacturing precision by enabling specialized processing for different process parameters while keeping each section's complexity manageable through functional decomposition
Solution Approach 2:
The patent merges the outputs from multiple network sections that process data using different criteria and algorithms. This consolidation integrates diverse processing results into a unified virtual metrology output, achieving high manufacturing precision through combined insights while managing overall system complexity through structured integration
Data Source
AI summary
A virtual metrology apparatus, a virtual metrology method, and a virtual metrology program that allow a highly accurate virtual metrology process to be performed is provided. A virtual metrology apparatus includes an acquisition unit configured to acquire a time series data group measured in association with processing of a target object in a predetermined processing unit of a manufacturing process, and a training unit configured to train a plurality of network sections by machine learning such that a result of consolidating output data produced by the plurality of network sections processing the acquired time series data group approaches inspection data of a resultant object obtained upon processing the target object in the predetermined processing unit of the manufacturing process.