Parallel pH Sensor Module for Safe Chemical Flow Monitoring

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Solution Overview

Problem

Existing technologies face challenges in safely performing pH measurement of chemical liquids without scattering strong acids or bases during liquid supply processes in substrate manufacturing, necessitating a solution that ensures safe and efficient pH monitoring.

Innovation Solution

A pH monitoring system with a sensor module disposed in parallel to a pipe connected to a drain, incorporating a sensor housing with a chamber for chemical liquid reception, an inlet and outlet valve system, and a pH sensor, allowing real-time pH measurement without interfering with the chemical liquid flow and preventing scattering.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a pH sensor is directly inserted into the chemical liquid flow path for real-time measurement, then measurement precision is improved, but the risk of chemical scattering and safety hazards increases

Engineering Contradiction:
ImprovepH measurement precisionVSAvoidchemical scattering risk
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The system divides the flow path into two separate paths: a main flow path for chemical liquid transport and a branched sensor path for pH measurement. This segmentation allows the pH sensor to measure liquid properties without being directly exposed to the full flow, reducing scattering risk while maintaining measurement accuracy through controlled liquid delivery via the pump and valve system.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A pump and valve system act as intermediaries between the main chemical liquid flow and the pH sensor. The pump delivers controlled amounts of liquid to the sensor housing, and valves regulate flow timing, enabling indirect measurement that protects the sensor from direct exposure to hazardous chemicals while still providing real-time pH data.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If a pH sensor is placed in parallel to the drain pipe for safe measurement, then chemical scattering risk is reduced, but measurement precision may deteriorate due to potential liquid accumulation or flow interference

Engineering Contradiction:
Improvechemical scattering riskVSAvoidpH measurement precision
Core Design Contradiction:
Object-affected harmful factorsVSMeasurement precision

Solution Approach 1:

The system performs preliminary actions by using the pump to actively deliver fresh chemical liquid to the sensor housing before measurement occurs. Valves are positioned to ensure proper flow sequencing, and the sensor housing is designed with drainage features to prevent liquid accumulation, thereby maintaining measurement precision while keeping the sensor in a safe parallel position to the main flow path.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The pump and valve system maintains continuous operation to ensure steady liquid delivery to the pH sensor in the parallel configuration. This continuous flow action prevents liquid accumulation in the sensor housing and ensures consistent measurement conditions, thereby maintaining measurement precision despite the sensor being positioned in parallel to the main drain pipe.

Inventive Principle:
Principle #20Continuity of useful action

3Object-affected harmful factors

If valves and pump are added to enable safe indirect pH measurement, then chemical scattering risk is reduced, but device complexity increases

Engineering Contradiction:
Improvechemical scattering riskVSAvoidsensor module complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The pump, valves, sensor housing, and pH sensor are merged into a single integrated sensor module assembly. This combination consolidates multiple components into one unit that can be installed as a single device in the parallel configuration, reducing the overall system complexity while maintaining the safety benefits of indirect measurement through the controlled flow path.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables safe and real-time pH measurement of chemical liquids without disrupting the manufacturing process, reducing the risk of chemical scattering and ensuring continuous monitoring without residual liquid accumulation.

Implementation Method 1

a pH sensor releasably mounted to the sensor housing

Methodology Applied
Scientific EffectpH measurement: Electrochemiluminescence

Data Source

PatentUS12360072B2PH monitoring systems having sensor modules
Publication Date: 2025.07.15 SAMSUNG ELECTRONICS CO LTD
  • US12360072B2 patent drawing
  • US12360072B2 patent drawing
  • US12360072B2 patent drawing

AI summary

A pH monitoring system includes a first pipe, and a second pipe and a third pipe each branched from the first pipe, a drain connected to the third pipe, a sensor module connected to the second pipe, the sensor module including an inlet valve connected to the second pipe, an outlet valve connected to the drain, and a chamber configured to receive a chemical liquid therein, and a pH sensor mountable to the sensor housing. The sensor module is disposed in parallel to the third pipe.