Parallel Image Segmentation for Faster X-Ray Spectral Acquisition

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Solution Overview

Problem

Current methods for material analysis, such as mineralogy classification, face challenges in efficiently combining X-ray acquisition and image segmentation due to time-consuming X-ray detection and complex, error-prone segmentation algorithms, leading to over-segmentation and increased acquisition time, especially in automated and unattended data acquisition.

Innovation Solution

A system and method for parallel implementation of X-ray acquisition and image segmentation, utilizing a scanning microscope system with separate detectors for backscattered electrons and X-rays, and a data-processing system for coordinated image analysis and scan location determination, allowing non-overlapping time intervals for detection and segmentation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If complex algorithms are used for reliable grain identification, then measurement precision is improved, but loss of time increases

Engineering Contradiction:
Improvegrain identification accuracyVSAvoidsegmentation time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies preliminary action by performing image segmentation in parallel with X-ray acquisition rather than sequentially. The segmentation process starts immediately after BSE image acquisition while X-ray scanning is ongoing, so that scan location determination is prepared in advance. This allows the complex segmentation algorithms to execute without delaying the X-ray measurement process, resolving the contradiction between using complex algorithms and maintaining time efficiency.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If the number of scan locations is reduced for X-ray detection, then productivity is improved, but measurement precision deteriorates

Engineering Contradiction:
Improveacquisition speedVSAvoidgrain identification accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent determines scan locations through image segmentation as a preliminary action that occurs in parallel with X-ray acquisition. By preparing the segmentation results beforehand, the system can select an optimized number of scan locations without compromising grain identification accuracy. The segmentation provides reliable grain boundaries and characteristics that guide the selection of representative scan locations, ensuring both productivity and measurement precision.

Inventive Principle:
Principle #10Preliminary action

3Loss of time

If fast and simple segmentation algorithm is used, then loss of time is reduced, but measurement precision deteriorates due to over-segmentation

Engineering Contradiction:
Improvesegmentation timeVSAvoidgrain identification accuracy
Core Design Contradiction:
Loss of timeVSMeasurement precision

Solution Approach 1:

The patent implements continuity of useful action by running the segmentation process continuously in parallel with the X-ray acquisition process. Rather than completing segmentation before X-ray scanning or interrupting X-ray scanning for segmentation, both processes operate simultaneously and continuously. This eliminates idle time in the SEM while ensuring that segmentation is performed thoroughly enough to avoid over-segmentation, as the process has sufficient computational resources and time allocated during the parallel execution.

Inventive Principle:
Principle #20Continuity of useful action

4Productivity

If parallel implementation of X-ray acquisition and image segmentation is implemented, then productivity is improved, but device complexity increases

Engineering Contradiction:
Improveoverall acquisition timeVSAvoidsystem coordination complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent applies segmentation by dividing the overall analysis process into two independent parallel tasks: image segmentation and X-ray acquisition. Each task can be executed independently by separate computational and measurement subsystems. The BSE image processing for segmentation is separated from the X-ray spectrum collection, allowing both to proceed simultaneously without interfering with each other. This modular segmentation of the workflow reduces the coordination complexity compared to a tightly coupled sequential system.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces overall acquisition time by a factor of at least 1.2 to 2, enhances accuracy by minimizing over-segmentation, and optimizes resource utilization through parallel processing, while maintaining high precision in chemical composition analysis.

Implementation Method 1

Backscattered electrons (BSE) originate from the primary electron beam, which, as the name suggests, are reflected back (i.e., out of the sample) via elastic scattering on the sample atoms.

Methodology Applied
Scientific EffectElastic scattering:

Implementation Method 2

characteristic X-rays are emitted when primary electrons cause the ejection of an electron in an inner shell of a sample atom, creating an electron hole. This electron hole is then filled by another electron from an outer atomic shell through the emission of an X-ray photon.

Methodology Applied
Scientific EffectCharacteristic X-ray emission:

Data Source

PatentEP4024037B1Parallel image segmentation and spectral acquisition
Publication Date: 2026.05.13 FEI CO
  • EP4024037B1 patent drawingFigure 1
  • EP4024037B1 patent drawingFigure 2
  • EP4024037B1 patent drawingFigure 3

AI summary

A system configured for material analysis and mineralogy is disclosed. The system comprises a scanning microscope system. The scanning microscope system comprises a first detector and a second detector. The system further comprises a data-processing system. The data-processing system comprises a data-storage component and a segmentation component. The data-storage component is configured for providing at least one image of a sample based on first emissions from a plurality of first scan locations. The segmentation component is configured for determining at least one or a plurality of second scan locations for at least one or a plurality of region(s) of the at least one image. The second detector is configured for detecting second emissions from at least one of the second scan locations of at least one of the regions. The system is further configured for determining the second scan location(s) for the region(s) and detecting the second emissions from the at least one of the second scan locations of the at least one of the regions in parallel. Also, a method for determining properties of a sample is disclosed. The method comprises performing an image providing step. The image providing step comprises providing at least one image of a sample based on first emissions from a plurality of first scan locations. The method further comprises a segmentation step. The segmentation step comprises determining at least one or a plurality of second scan location(s) for at least one or a plurality of region(s) of the at least one image. The method also comprises a detection step. The detection step comprises detecting second emissions from at least one of the second scan locations of at least one of the regions. The method also comprises performing the segmentation step and the detection step in parallel. Further, a computer program product comprising instructions which, when the program is executed by a computer, cause the computer to carry out the steps of the method, is disclosed.