Parallel Shift Operation for Multiple Reactors
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Solution Overview
Problem
In semiconductor manufacturing, expanding plasma-enhanced atomic layer deposition (PEALD) systems to multiple reactors increases system complexity and cycle time due to the need for multiple gas lines, pressure control valves, and exhaust lines, leading to inefficiencies in gas flow control and process controllability, particularly when switching between different reactant gases.
Innovation Solution
A method of parallel shift operation for multiple reactors involves continuously supplying multiple gases simultaneously through main gas lines with branch lines, where only one branch line is open at a time, maintaining equal inflow and outflow rates, and switching between gases without altering these rates, allowing for alternate processing with shared gas lines and reduced transition time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple gas lines are provided for each reactor to supply different reactant gases, then gas flow control flexibility is improved, but system complexity and device complexity increase
Solution Approach 1:
The patent combines multiple gas lines into a shared gas line that serves multiple reactors. A single gas line is equipped with multiple valves that can selectively direct reactant gas to different reactors, eliminating the need for separate gas lines for each reactor while maintaining the ability to control gas flow to each reactor independently
Solution Approach 2:
The shared gas line is designed to perform multiple functions by serving different reactors with different reactant gases through valve control. The same gas line infrastructure is universally used across multiple reactors, reducing overall system complexity while maintaining versatility in gas supply
2Adaptability or versatility
If multiple pressure control valves and exhaust lines are provided for each reactor, then process controllability between reactors is improved, but device complexity increases
Solution Approach 1:
The patent combines multiple exhaust lines into a shared exhaust line that receives exhaust gas from multiple reactors. Pressure control valves are strategically positioned to regulate flow from different reactors through the shared exhaust line, reducing the total number of exhaust lines and pressure control valves while maintaining independent pressure control capability for each reactor
3Ease of operation
If on/off control of precursor flow is used, then precursor supply control is simplified, but total gas flow rate and reactor pressure become altered causing improper precursor gas inflow
Solution Approach 1:
The patent implements periodic switching of valve configurations to control precursor flow. Instead of simple on/off control, the system uses periodic switching between different valve states to maintain continuous gas flow while controlling precursor delivery, preventing pressure fluctuations and ensuring stable reactor conditions
Solution Approach 2:
The system maintains continuous gas flow through the reactor by using multiple valves in a coordinated switching arrangement. When one valve closes to stop precursor flow, another valve opens to maintain the carrier gas flow and pressure, ensuring continuous useful action and preventing pressure instability
4Reliability
If switching between precursor and inactive gas is used to maintain flow rate, then total flow rate and reactor pressure are fixed, but transition time between reactant gases increases
Solution Approach 1:
The system prepares the valve configuration in advance for the next gas switching operation. Valves are positioned and pre-configured during the deposition process so that when gas switching is needed, the transition can occur immediately without delay for valve repositioning or system reconfiguration
Solution Approach 2:
The patent implements dynamic valve switching that can occur at any point during the gas flow without requiring the system to stop or enter a transition state. The multi-valve configuration allows for dynamic redistribution of gas flow paths, enabling rapid switching between reactant gases while maintaining continuous flow and constant pressure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces system components, minimizes transition time between reactant gas supplies, maintains constant gas flow rates, and increases partial pressure of reactant gases, enhancing surface adsorption and reaction rates while improving process controllability and stability.
Implementation Method 1
a liquid precursor is vaporized in a tank
Implementation Method 2
the carrier gas carries the vaporized precursor and flows out together from the tank
Implementation Method 3
the adsorbed surface is activated by RF plasma for reaction of the precursor with a reactant gas
Implementation Method 4
a precursor gas is supplied into a reactor chamber and the precursor is adsorbed onto a wafer surface
Data Source
AI summary
A method of parallel shift operation of multiple reactors includes: (i) continuously supplying n gases numbered 1 to n simultaneously to n gas ports via n main gas lines, respectively, at a constant flow rate, wherein one of branch gas lines of each main gas line is in an open state so that the inflow rates of the respective reactors are equal, and the outflow rates of the respective reactors are equal; and (ii) while maintaining the inflow rates and the outflow rates of the respective reactors, simultaneously closing the one of the branch gas lines of each main gas line in the open state and opening another one of the branch gas lines of each main gas line so that different numbered gases are continuously supplied to the respective reactors in parallel without changing the inflow rates and the outflow rates of the reactors.