Parallel Substrate Treatment Lines for Flexible Process Switching
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Solution Overview
Problem
Conventional substrate treating apparatuses face difficulties in efficiently changing between different treatment processes for substrates, leading to inefficient substrate transport and reduced capability to perform multiple processes in parallel.
Innovation Solution
A substrate treating apparatus with multiple treatment lines and a controller that allows for independent process changes on each line, enabling parallel execution of various treatment processes, including resist film formation and development, and the ability to run normal operations and test processes simultaneously.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single main transport mechanism is used to transport substrates through treating units, then the apparatus structure is simplified, but the capability to perform multiple different treatment processes in parallel is reduced
Solution Approach 1:
The patent divides the single transport path into multiple independent substrate treatment lines (first line, second line, etc.), each with its own main transport mechanism. This segmentation allows each line to independently execute different treatment processes simultaneously, resolving the contradiction between structural simplicity and process versatility.
Solution Approach 2:
Each substrate treatment line is designed with universal treating units that can perform multiple types of treatments (coating, heating, cooling, developing, etc.). The treating units are configured to handle different processes across multiple lines, enabling the system to execute various treatment processes in parallel while maintaining a relatively compact structure.
2Reliability
If the main transport mechanism transports substrates through all treating units, then complete treatment processes can be performed, but the transport efficiency decreases when different processes are required for different substrates
Solution Approach 1:
By segmenting the treatment system into multiple independent lines, each substrate can be routed through the specific treating units required for its process. This eliminates unnecessary transport through units not needed for particular substrates, improving transport efficiency while ensuring complete treatment through the appropriate units.
Solution Approach 2:
The patent implements dynamic control of substrate transport paths, where the controller can selectively activate or deactivate treating units and adjust transport routes based on the required process for each substrate batch. This dynamic adaptability allows the system to optimize transport efficiency for different process configurations while maintaining treatment completeness.
3Adaptability or versatility
If multiple substrate treatment lines are provided with independent main transport mechanisms, then multiple different processes can be performed in parallel, but the device complexity increases
Solution Approach 1:
The patent merges multiple substrate treatment lines into a single integrated apparatus structure. The treating units (coating units, heating units, cooling units, developing units) are shared resources that serve multiple lines, reducing the overall complexity compared to having completely separate systems for each treatment line.
Solution Approach 2:
The treating units are designed with multi-functionality to serve multiple substrate treatment lines. For example, coating units can serve both the first and second treatment lines, as can heating, cooling, and developing units. This universality reduces the total number of components needed while maintaining the capability to perform multiple different processes in parallel.
Data Source
AI summary
A substrate treating apparatus for treating substrates includes a plurality of substrate treatment lines arranged vertically for carrying out plural types of treatment on the substrates while transporting the substrates substantially horizontally, and a controller for changing processes of treatment carried out on the substrates for each of the substrate treatment lines. By changing the processes of treatment carried out for the substrates for each substrate treatment line, the processes of treatment carried out for the substrates can be changed for each substrate conveniently. Thus, a plurality of different processes of treatment corresponding to the number of substrate treatment lines can be carried out in parallel for the respective substrates.