Parallel Template Imprint Lithography Throughput
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current lithographic techniques face limitations in achieving high resolution and throughput due to diffraction barriers, complex optics, and high costs associated with short wavelength radiation, as well as mechanical deformation and temperature differentials in imprint lithography processes.
Innovation Solution
The use of multiple templates operating in parallel to imprint a significant area of a substrate simultaneously, with controlled displacement and orientation to form multiple imprints in an imprintable medium, allowing for efficient patterning and etching of the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple templates are used to imprint multiple regions simultaneously, then throughput is improved, but device complexity increases
Solution Approach 1:
The substrate surface is divided into multiple spaced target regions, with each region imprinted by a separate template. This segmentation allows parallel processing of multiple regions simultaneously, increasing throughput while managing complexity through modular template design
Solution Approach 2:
Multiple templates operate in parallel on the same substrate, combining their individual imprinting actions to achieve comprehensive coverage of multiple target regions in a single processing cycle, thereby multiplying productivity without requiring sequential operations
2Manufacturing precision
If templates are displaced to imprint multiple spaced regions, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The templates are made movable relative to the substrate, allowing dynamic positioning and displacement between different target regions. This enables precise patterning across multiple areas while maintaining control over template positions through mechanical or actuation systems
Solution Approach 2:
Template displacement occurs in spatial dimensions across the substrate surface, allowing templates to access different target regions by moving in controlled directions. This dimensional approach to template positioning enables comprehensive coverage while maintaining precision through geometric relationships
Data Source
AI summary
An imprinting method is disclosed that, in embodiment, includes contacting first and second spaced target regions of an imprintable medium on a substrate with first and second templates respectively to form respective first and second imprints in the medium and separating the first and second templates from the imprinted medium.