Parallel Vaporizing Sections for Semiconductor Precursor Delivery
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Solution Overview
Problem
Conventional vaporizers for semiconductor manufacturing face issues with thermal decomposition and clogging due to high-k precursor materials with low vapor pressure, leading to residue formation and operational halts, especially when multiple nozzles overlap, causing uneven mist concentration and increased thermal decomposition.
Innovation Solution
A vaporizer design featuring multiple parallel vaporizing sections with continuous nozzles and heating channels, where each precursor flow is independent, allowing uniform mist concentration and effective vaporization at lower temperatures, reducing thermal decomposition and clogging risks, and enabling continuous operation even if one nozzle is clogged.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the liquid precursor is heated to high temperature to vaporize it due to low vapor pressure, then vaporization efficiency is improved, but thermal decomposition occurs causing residue and clogging
Solution Approach 1:
The vaporizing section is divided into multiple independent vaporizing sections (first vaporizing section, second vaporizing section, etc.), each with its own nozzle and heating channel. This segmentation allows each section to handle a portion of the precursor flow independently, reducing the concentration of mist in each channel and enabling effective vaporization at lower temperatures, thus preventing thermal decomposition while maintaining overall vaporization efficiency
Solution Approach 2:
Each vaporizing section is designed with specific local characteristics - the heating channels are arranged continuously on the downstream side of nozzles, and each section can be optimized for its specific function. The continuous arrangement ensures that the heating channel immediately follows the nozzle without interruption, creating optimal local conditions for vaporization at lower temperatures
2Device complexity
If a single nozzle structure is used, then device simplicity is maintained, but operation halts completely when the nozzle is clogged
Solution Approach 1:
The single nozzle is segmented into multiple nozzles (first nozzle, second nozzle, etc.), each forming part of independent vaporizing sections. This segmentation ensures that if one nozzle becomes clogged, the other nozzles continue to operate, maintaining operational continuity while keeping each individual nozzle relatively simple in structure
Solution Approach 2:
The redundant vaporizing sections serve as a backup system in advance. When one section becomes clogged, the system has already prepared alternative pathways through the other sections, allowing continuous operation without complete shutdown. This prior cushioning against potential failures maintains reliability while preserving structural simplicity
3Productivity
If multiple nozzles are arranged to increase vaporization flow, then productivity is improved, but mist concentration becomes uneven causing thermal decomposition
Solution Approach 1:
Multiple nozzles are segmented into independent vaporizing sections, each with its own heating channel. This segmentation prevents mist from different nozzles from mixing and creating concentration variations. Each section processes a discrete portion of the precursor flow, maintaining uniform mist concentration within each channel while achieving high overall vaporization flow through the combined output of all sections
Solution Approach 2:
Each vaporizing section is designed with optimized local characteristics, including the continuous arrangement of heating channels on the downstream side of nozzles. This local optimization ensures that each section operates with uniform mist concentration and appropriate heating conditions, preventing thermal decomposition while maintaining high productivity across the entire system
4Ease of manufacture
If heating channel and nozzle are discontinuous with space between them, then manufacturing ease is improved, but mist concentration becomes uneven due to spray overlap differences
Solution Approach 1:
The heating channel is arranged continuously on the downstream side of the nozzle without interruption or space between them. This continuous local arrangement ensures that the mist spray from each nozzle is immediately and uniformly heated, maintaining consistent mist concentration. The continuous design, while potentially more complex to manufacture, guarantees precise control over mist concentration uniformity, preventing thermal decomposition
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design allows for efficient vaporization at lower temperatures, preventing residue and clogging, and ensuring continuous precursor flow, with the ability to handle higher precursor flow rates compared to conventional vaporizers while maintaining uniform mist concentration.
Implementation Method 1
a nozzle for spraying the precursor
Implementation Method 2
a heating channel arranged on the downstream side of the nozzle continuously thereto
Implementation Method 3
vaporizing section for vaporizing the precursor
Data Source
AI summary
This invention provides a vaporizer that prevents deterioration of a precursor while reducing a residue, that can expect reduction in risk of clogging, and that can increase vaporization flow easily. The vaporizer comprises an inlet port for introducing a precursor in a liquid phase or a gas-liquid mixture phase, a vaporizing section for vaporizing the precursor arranged on the downstream side of the inlet port, and an outlet port for delivering the precursor vaporized at the vaporizing section, wherein the vaporizing section is of a flow channel type comprising a nozzle for spraying the precursor and a heating channel arranged on the downstream side of the nozzle continuously thereto. A plurality of vaporizing sections are arranged in parallel between the inlet port and the outlet port, and arranged such that each vaporizing section can distribute the precursor independently of each other.