Parametric Test Program Generator for Wafer Probe
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Solution Overview
Problem
The semiconductor industry faces challenges in generating and managing complex test programs for wafer probe testing, particularly with the increasing complexity of technologies and the need for adaptive testing strategies, which often require significant effort and resources, and existing automatic test program generators are limited in supporting mature technologies and are costly.
Innovation Solution
A parametric test program generator algorithm that uses an element-based approach with parameterized test sequences and variable groups, allowing for flexible and portable test programs that can support multiple elements and technologies by associating reusable test sequences with physical components and modifying variable groups to adapt to different testing conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If traditional scribe line test programs with approximately 100 tests are used, then test coverage for various test structures is provided, but the test program cannot support all requirements specified in the Process Control Document for complex technologies with >70 process flows and >100 technology components
Solution Approach 1:
The test program is segmented into modular test sequences, each targeting specific technology components or process flows. This allows the test program to be divided into manageable units that can be independently configured and reused across different testing scenarios, enabling support for complex technologies without requiring a monolithic test structure.
Solution Approach 2:
The patent implements a universal test program framework that can adapt to multiple process flows and technology components through parameterization. The same test program structure serves multiple functions by dynamically configuring test sequences based on the specific technology being tested, eliminating the need for separate test programs for each technology variant.
2Adaptability or versatility
If the number of tests per parametric test program is increased to several thousand tests to support all Process Control Document requirements, then comprehensive technology component characterization is achieved, but the sustaining effort for test engineering increases considerably
Solution Approach 1:
Test sequences are pre-configured and stored in a library with defined parameters and structures. When a test program is needed, the system retrieves and configures pre-existing test sequences rather than creating them from scratch, significantly reducing development and maintenance time while maintaining comprehensive test coverage.
Solution Approach 2:
The patent uses parameterized test sequences where specific parameters (such as component types, process conditions, test conditions) can be changed to adapt the same test sequence to different testing scenarios. This allows a single test sequence template to serve multiple purposes by simply modifying parameters, reducing the need to create and maintain thousands of separate test programs.
3Productivity
If component-based test is implemented to test only those technology elements utilized for device design, then test time is saved by testing only qualified elements, but the test engineer needs to support multiple, sometimes many, probe programs for a given technology
Solution Approach 1:
The patent creates a universal probe program framework that can dynamically adapt to different device configurations and technology elements. Instead of maintaining multiple separate probe programs, the system uses a single configurable program that automatically selects and configures appropriate test sequences based on the specific device being tested, eliminating the need for engineers to support multiple probe programs.
Solution Approach 2:
The test program structure is made dynamic and adaptable rather than static. The system can dynamically configure test sequences based on the actual device characteristics and requirements, allowing the same probe program to efficiently test different device types and technology elements without requiring separate programs for each case.
4Loss of time
If existing automatic test program generators such as TestPlanManager are used, then the time to develop Prime test programs is reduced, but the generators are limited in supporting mature technologies and require costly annual license keys
Solution Approach 1:
The patent implements a self-service test program generation system where the testing infrastructure itself provides the program generation capability through automated configuration based on device specifications. This eliminates the need for external commercial software licenses while maintaining the ability to generate test programs efficiently for both mature and new technologies.
Solution Approach 2:
The system uses highly parameterized test sequences that can be adapted to different technology nodes and process generations. By changing parameters rather than requiring different software solutions, the same test program framework can support both mature and emerging technologies, removing the limitation of commercial generators that are often optimized for specific technology ranges.
Data Source
AI summary
A method of probing wafers includes providing a processor running a parametric test program generator algorithm which execute steps including reading a stored first probe program including a first test sequence (TS1) having a first tests configured for probing at least a first circuit element (FCE) in a first scribe line module. TS1 includes (i) electrical pinning and geometrical data and (ii) first Variable Group data specific for the FCE including first test parameters having at least first forcing conditions. The (ii) is modified with modified second variable group data specific to a second circuit element (SCE) in a second scribe line module. The modified second Variable Group data includes modified second test parameters having second forcing conditions. (i) of TS1 is merged with the modified second Variable Group data to generate code for a second test sequence of a second probe program that is configured for probing the SCE.