Parasitic Extraction Using Compact Process Calibration Executables
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Solution Overview
Problem
The increasing complexity of parasitic effects in deep submicron process technologies leads to significant challenges in parasitic extraction, including increased runtime and memory requirements, and the need for proprietary process calibration data encryption, which slows down the extraction process and complicates data management.
Innovation Solution
A method using a compact representation of process calibration data, where geometric information from layout designs is extracted and used to compute parasitic values through dynamically linkable executable files generated from C++ code, reducing the need for large empirical formulas and look-up tables, and enabling efficient parasitic extraction and post-layout verification processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If process calibration data are encrypted to protect proprietary information, then data security is improved, but parasitic extraction runtime increases
Solution Approach 1:
The patent applies preliminary action by pre-compiling process calibration data into executable files before the actual parasitic extraction process. The calibration data are transformed into optimized executable code that can be directly executed without decryption overhead during runtime, thus maintaining security while reducing extraction time
Solution Approach 2:
The patent creates a copy of the process calibration data in the form of executable files that contain the compiled calibration information. These executable copies are generated in advance and used during parasitic extraction, eliminating the need to repeatedly decrypt and process the original encrypted calibration data
2Measurement precision
If process calibration data are stored in detailed empirical formulas and look-up tables, then measurement precision is improved, but memory capacity requirement increases
Solution Approach 1:
The patent applies parameter changes by transforming the storage format of calibration data from detailed empirical formulas and look-up tables into compiled executable code. This changes the physical state of the data from human-readable text to machine-executable binary, significantly reducing memory requirements while preserving the precision of the calibration information
Solution Approach 2:
The patent extracts the essential computational logic from the detailed empirical formulas and look-up tables and embeds it directly into the executable files. This extraction removes the need to store large amounts of raw calibration data, keeping only the compiled executable representation that contains all necessary precision information
3Measurement precision
If process calibration data are stored in detailed empirical formulas and look-up tables, then calculation accuracy is improved, but parasitic extraction runtime increases
Solution Approach 1:
The patent applies preliminary action by pre-compiling the calibration data into optimized executable code that contains pre-calculated parameters and algorithms. During parasitic extraction, the tool simply executes this pre-compiled code rather than evaluating complex empirical formulas in real-time, thus maintaining accuracy while dramatically reducing runtime
Solution Approach 2:
The patent substitutes the mechanical process of evaluating empirical formulas and searching look-up tables with a more efficient computational approach using compiled executable code. The complex calculations are replaced by direct execution of pre-compiled instructions, reducing computational overhead while preserving accuracy
4Adaptability or versatility
If the number of transistors increases to improve circuit functionality, then adaptability is improved, but parasitic extraction complexity increases
Solution Approach 1:
The patent applies universality by creating a unified executable file-based calibration system that can handle various transistor types, sizes, and configurations through a single standardized interface. The compiled executable code contains generalized algorithms that automatically adapt to different circuit complexities without requiring separate processing paths
Data Source
AI summary
Aspects of the disclosed technology relate to techniques of parasitic extraction using compact representation of process calibration data. Geometric information of a layout feature in the layout design comprising geometric parameters is extracted. Parasitic values associated with the layout feature are then computed based on the geometric information and one or more executable files selected in a plurality of executable files which are a compact representation of process calibration data.