Particle Beam Irradiation Apparatus Brightness Adjustment

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing charged particle beam irradiation apparatuses require a long time for brightness adjustments when using multiple detectors, as each detector needs to be adjusted individually, which slows down the observation process.

Innovation Solution

A particle beam irradiation apparatus with a control unit that acquires observation images from multiple detectors, calculates the brightness of specific regions, and adjusts the detectors' settings to match target brightness values, allowing for simultaneous or parallel adjustments across multiple detectors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If brightness adjustment is performed individually for each detector, then the brightness of each detector can be optimized, but the time required for brightness adjustments increases

Engineering Contradiction:
Improvebrightness optimizationVSAvoidadjustment time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent combines multiple detectors into a detector group and performs brightness adjustment collectively for the entire group rather than individually for each detector. The control unit acquires a group image containing regions from multiple detectors, calculates average brightness across all detectors, and applies uniform brightness adjustment parameters to the entire detector group, thereby reducing adjustment time while maintaining optimal brightness.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent creates a detector group that functions as a unified detection unit, where the brightness adjustment mechanism serves multiple detectors simultaneously. The control unit applies the same brightness adjustment parameters to all detectors in the group, making the adjustment process universal across the detector group rather than requiring separate adjustments for each detector.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If multiple detectors are used for observation, then the observation capability and coverage are improved, but the complexity of brightness adjustment increases

Engineering Contradiction:
Improveobservation capabilityVSAvoidadjustment complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges multiple detectors into a single detector group entity for the purpose of brightness adjustment. Instead of managing brightness parameters for each detector separately, the system treats the detector group as one unit, acquiring a group image that combines regions from all detectors and applying a unified brightness adjustment, thereby reducing operational complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent uses the group image, which is a composite representation of images from multiple detectors, as the basis for brightness adjustment. By calculating average brightness from the group image and applying adjustments based on this composite data, the system simplifies the adjustment process while maintaining the benefits of multiple detectors.

Inventive Principle:
Principle #26Copying

Data Source

PatentUS11335534B2Particle beam irradiation apparatus
Publication Date: 2022.05.17 HITACHI HIGH TECH ANALYSIS CORP
  • US11335534B2 patent drawing
  • US11335534B2 patent drawing
  • US11335534B2 patent drawing

AI summary

The particle beam irradiation apparatus includes: an irradiation unit configured to radiate a particle beam; a first detection unit configured to detect first particles; a second detection unit configured to detect second particles; an image forming unit configured to form an observation image based on a first signal obtained by the detection of the first particles, which is performed by the first detection unit, and to form an observation image based on a second signal obtained by the detection of the second particles, which is performed by the second detection unit; and a control unit configured to calculate a brightness of a first region in the formed first observation image and perform a brightness adjustment of the first detection unit based on a first target brightness as a first brightness adjustment when the brightness of the first region is different from the first target brightness.