Particle Beam Control Parameter Mapping for Image Quality
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Solution Overview
Problem
Current electron beam apparatuses face challenges in obtaining optimal image quality due to the need for manual adjustment of multiple control parameters, which can lead to suboptimal image quality when dealing with varying sample materials and topographies, as mathematical models often fail to account for all parameters and assume simplified conditions.
Innovation Solution
A method and system that determine a functional relationship between control parameter values and landing energy or distance by recording images with sufficient quality, allowing for quick calculation of corresponding control parameter values for desired image quality, enabling automated recording of images with consistent quality across different energy or distance settings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual adjustment of multiple control parameters is performed, then image quality can be optimized for specific conditions, but the process becomes time-consuming and complex
Solution Approach 1:
The patent establishes functional relationships between control parameters and landing energy/distance, allowing automatic determination of optimal parameter values. Instead of manual adjustment, the system calculates parameters based on mathematical models that describe the relationships, thereby maintaining high image quality while eliminating complex manual intervention.
Solution Approach 2:
The patent replaces manual mechanical adjustment with automated computational determination. Control parameters are no longer adjusted manually but are calculated using functional relationships and mathematical models, substituting human operation with automated information processing.
2Ease of manufacture
If mathematical models with simplified assumptions are used, then the calculation process is simplified, but image quality becomes suboptimal for varying sample materials and topographies
Solution Approach 1:
The patent creates adaptable functional relationships that can adjust to different sample materials and topographies. Rather than using fixed simplified models, the system establishes relationships that dynamically respond to varying conditions, allowing accurate determination of control parameters for diverse samples while maintaining computational feasibility.
3Manufacturing precision
If multiple control parameters are manually adjusted for different landing energies, then optimal images can be obtained for each energy setting, but the process requires significant time and effort
Solution Approach 1:
The patent performs preliminary establishment of functional relationships between control parameters and landing energy/distance. Once these relationships are defined, optimal control parameters for any desired landing energy can be quickly calculated without time-consuming manual adjustment, enabling rapid acquisition of high-quality images at multiple energy settings.
Solution Approach 2:
The patent creates a mathematical model (functional relationship) that copies and represents the complex interactions between parameters. This model serves as a simplified representation that allows quick calculation of optimal parameters without repeating the complex manual optimization process for each new condition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for rapid and automated generation of high-quality images by determining functional relationships between control parameters and landing energy or distance, significantly improving image quality and reducing the complexity of manual adjustments.
Implementation Method 1
an electron beam apparatus or as an ion beam apparatus
Implementation Method 2
an ion beam apparatus
Implementation Method 3
A guide unit is understood to mean any unit for guiding the particle beam onto the object, but also units for shaping the particle beam which is then guided to the object. By way of example, the guide unit is embodied as an objective lens for focusing the particle beam onto the object
Implementation Method 4
The electrons of the primary electron beam interact with the object to be examined. Interaction particles and/or interaction radiation result as a consequence of the interaction. By way of example, the interaction particles are electrons. In particular, electrons are emitted by the object—the so-called secondary electrons
Implementation Method 5
electrons of the primary electron beam are scattered back—the so-called backscattered electrons
Implementation Method 6
By way of example, the interaction radiation is x-ray radiation or cathodoluminescence
Implementation Method 7
By way of example, the interaction radiation is x-ray radiation or cathodoluminescence
Implementation Method 8
The interaction particles form the so-called secondary particle beam and are detected by at least one particle detector. The particle detector generates detection signals which are used to generate an image of the object
Implementation Method 9
At least one radiation detector is used to detect the interaction radiation
Implementation Method 10
the electrons of the primary electron beam are accelerated using an acceleration voltage of 2 kV to 30 kV and guided through an electron column of the electron beam apparatus. The electrons of the primary electron beam are only decelerated to the desired landing energy, with which they are incident on the object, in the region between the objective lens and the object
Implementation Method 11
the higher the electrons of the primary electron beam are initially accelerated in the electron beam apparatus and decelerated to a desired energy (referred to as landing energy) at the end of the objective lens or in the region of the objective lens and the object
Data Source
AI summary
Generating an image of an object and/or a representation of data about the object uses a particle beam apparatus. The particle beam apparatus comprises at least one control unit for setting a guide unit by selecting a value of a control parameter of the control unit. A functional relationship is determined between a first control parameter value and a second control parameter value depending on the predeterminable range of a landing energy of the particles. A desired value of the landing energy is set. The value of the control parameter corresponding to the desired value of the landing energy is selected on the basis of the determined functional relationship and the guide unit is controlled using the value of the control parameter corresponding to the desired value of the landing energy.