Particle Beam Current Control via Variable Extraction-Anode Voltage

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Solution Overview

Problem

Existing particle beam devices struggle to achieve high maximum current strength and dynamic range for the current strength of the particle beam, which is essential for various applications.

Innovation Solution

The particle beam device comprises a particle source, an extraction stop with an aperture, a driver system to apply variable electrical potentials, an anode stop, a beam tube, and a controller to control the driver system, allowing for variable setting of the voltage between the extraction stop and the anode stop to adjust the current strength and dynamic range of the particle beam.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a high current strength of the particle beam is set, then the maximum current strength is improved, but the dynamic range for current strength adjustment deteriorates

Engineering Contradiction:
Improvecurrent strength of the particle beamVSAvoiddynamic range of current strength
Core Design Contradiction:
Quantity of substanceVSAdaptability or versatility

Solution Approach 1:

The patent applies dynamics by making the voltage between the extraction stop and anode stop variable and adjustable. The driver system enables continuous adjustment of the extraction stop potential φExt relative to the anode stop potential φA, allowing the electric field strength to be dynamically changed. This dynamic control mechanism permits the particle beam current strength to be varied across a wide range, resolving the contradiction between achieving high maximum current strength and maintaining broad adjustability for different applications.

Inventive Principle:
Principle #15Dynamics

2Quantity of substance

If the voltage between the extraction stop and the anode stop is increased, then the current strength of the particle beam is improved, but the complexity of the driver system deteriorates

Engineering Contradiction:
Improvecurrent strength of the particle beamVSAvoidcomplexity of the driver system
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The driver system is designed with multi-functionality to manage multiple electrical potentials (particle source potential φHT, extraction stop potential φExt, anode stop potential φA, beam tube potential φL) within a single integrated control architecture. This universal control system can adjust any of these potentials independently or in combination, allowing the same driver system to achieve different current strengths and beam configurations without requiring separate control circuits for each function, thereby managing complexity while maintaining high current strength capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables the particle beam device to achieve high maximum current strength and a wide dynamic range, allowing for flexible operation across different applications by controlling the voltage between the extraction stop and the anode stop.

Implementation Method 1

an electrical extraction stop potential φExt is applied to the extraction stop, thereby forming, from the charged particles, a particle beam

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 2

the driver system is furthermore configured to apply an electrical anode stop potential φA, able to be set in a variable manner and different from the extraction stop potential φExt, to the anode stop

Methodology Applied
Scientific EffectElectric field: Electric Field

Data Source

PatentUS12300461B2Particle beam device, method for operating the particle beam device and computer program product
Publication Date: 2025.05.13 CARL ZEISS MICROSCOPY GMBH
  • US12300461B2 patent drawing
  • US12300461B2 patent drawing
  • US12300461B2 patent drawing

AI summary

A particle beam device has a particle source, an extraction stop, an anode stop and a beam tube. A driver system of the particle beam device is configured to apply an electrical excitation stop potential to the extraction stop, to apply an electrical anode stop potential, able to be set in a variable manner, to the anode stop and to apply an electrical beam tube potential to the beam tube. A controller of the particle beam device is configured to control the driver system such that a voltage between the extraction stop and the anode stop is able to be set in a variable manner, as a result of which a current strength of the particle beam passing through the aperture of the anode stop is able to be set in a variable manner.