Particle Beam Detector Extraction Field Shaping
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Particle beam devices face challenges in detecting interaction particles with high energy resolution and efficiency due to deformation of the extraction field by the sample and objective lens components, which affects detector efficiency.
Innovation Solution
A particle beam device with a configuration that includes two optical axes for electron and ion beams, a detector in a hollow body with carefully managed potential differences to create an extraction field, allowing interaction particles to pass through an inlet opening and be detected effectively, with adjustable potentials to optimize detector efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the detector is arranged close to the sample to maximize detector efficiency, then the extraction field is deformed by the sample and objective lens components, which deteriorates energy resolution
Solution Approach 1:
A field-shaping electrode is introduced as an intermediary component between the detector and the sample/objective lens system. This electrode actively shapes and corrects the extraction field, compensating for the deformation caused by the sample and objective lens, thereby maintaining both high detector efficiency and good energy resolution
Solution Approach 2:
The potential of the field-shaping electrode is adjusted to optimize the extraction field configuration. By changing the electrical parameter (potential) of the field-shaping electrode, the extraction field can be shaped to achieve both high detector efficiency and good energy resolution simultaneously
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures good energy resolution and detector efficiency for secondary ions and other interaction particles, allowing for better image production and analysis of sample characteristics.
Implementation Method 1
the first hollow body voltage, the detector voltage, the control electrode voltage and/or the beam guide tube voltage are set such that an extraction field is generated
Implementation Method 2
a first beam generator (6) for generating a primary electron or ion beam
Implementation Method 3
a first beam generator (6) for generating a primary electron or ion beam
Implementation Method 4
a first objective lens for focusing the first particle beam onto the sample
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The invention relates to a particle beam device and to a method for operation of a particle beam device. The particle beam deivce has a sample chamber, a sample (16) which is arranged in the sample chamber, a first particle beam column (2), a second particle beam column and at least one detector (34), which is arranged in a first cavity (35, 38) in a first hollow body (36, 37), wherein the first cavity (35, 38) has a first inlet opening (39, 40). The first particle beam column (2) and the second particle beam column are arranged on one plane, while in contrast the detector (34) is not arranged on that plane. At least one control electrode (41) is arranged on the first particle beam column (2). Furthermore, the second particle beam column has a terminating electrode. A first hollow body voltage, a control electrode voltage and/or a terminating electrode voltage are/is chosen such that first interaction particles and/or second interaction particles enter the first cavity (35, 38) in the first hollow body (36, 37) through the first inlet opening (39, 40).