Particle Beam Electrode Low-Pass Filter Noise Reduction
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Solution Overview
Problem
Particle beam devices face challenges with high frequency disturbances and low signal-to-noise ratios due to long connecting lines between supply units and electrodes, leading to misguiding of particle beams and reduced imaging resolution.
Innovation Solution
Incorporating a low-pass filter connected to the electrodes within the particle beam device, positioned near the optical axis, to filter out high frequency disturbances and stabilize potentials, with cutoff frequencies ranging from 0.1 Hz to 1 MHz, and arranging electrodes and filters in a vacuum chamber to minimize frequency interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If long connecting lines are used between supply units and electrodes, then the electrode unit can be positioned flexibly, but high frequency disturbances increase and signal-to-noise ratio decreases
Solution Approach 1:
The patent divides the electrical connection path into two segments: a short connecting line between the supply unit and the low-pass filter, and another short connecting line between the low-pass filter and the electrode. The low-pass filter is positioned close to the electrode, segmenting the long connection into two short connections, thereby reducing high frequency disturbances and improving the signal-to-noise ratio while maintaining positioning flexibility.
2Ease of operation
If long connecting lines are used between supply units and electrodes, then installation flexibility is improved, but misguiding of particle beams increases
Solution Approach 1:
The low-pass filter acts as an intermediary component between the supply unit and the electrode. It is positioned close to the electrode and connected via short connecting lines, serving as a mediator that filters out high frequency disturbances before they reach the electrode, thereby preventing beam misguiding while allowing installation flexibility.
3Reliability
If low-pass filter is positioned near the electrode with short connecting lines, then signal-to-noise ratio is improved, but device complexity increases
Solution Approach 1:
The patent combines the low-pass filter and the electrode into a closely integrated arrangement within the particle beam device. The filter is positioned immediately adjacent to the electrode with minimal connecting line length, merging their functional spaces to reduce high frequency disturbances while avoiding excessive device complexity through efficient spatial utilization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves a high signal-to-noise ratio of 10^5 to 10^8 and reduces misguiding of particle beams, enhancing the stability and accuracy of beam guidance and imaging resolution.
Implementation Method 1
at least one low-pass filter which is connected to the first electrode and/or the second electrode by means of an electrical connection
Implementation Method 2
The first electrode interacts with the second electrode for guiding, shaping, correcting or aligning the particle beam
Data Source
AI summary
A particle beam device comprises a beam generator for generating a particle beam having charged particles and an electrode unit having a first electrode and a second electrode, wherein the first electrode interacts with the second electrode, in particular for guiding, shaping, aligning or correcting the particle beam. Moreover, the particle beam device comprises a low-pass filter being connected with at least one of: the first electrode and the second electrode, using an electrical connection. Additionally, the particle beam device comprises a mounting unit having an opening for the passage of the particle beam, wherein the at least one low-pass filter, the first electrode and the second electrode are arranged at the mounting unit. The electrode unit may comprise more than two electrodes, for example up to 16 electrodes.