Particle Beam Manipulator Attachment for Contamination-Free Frozen Objects
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Solution Overview
Problem
Existing methods for fastening objects to manipulators in particle beam apparatuses, especially frozen objects, result in contamination of components due to the deposition of precursors on multiple surfaces, leading to difficulties in further examinations and the need for frequent cleaning or replacement of manipulators.
Innovation Solution
A method involving the generation of corresponding surfaces on both the manipulator and the object using a particle beam, with the particle beam ablating and reapplying material in the boundary region to create a strong connection without contaminating other components, allowing for the precise alignment and movement of frozen objects without contaminating the manipulator.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If precursors are deposited on multiple surfaces to fasten frozen objects to manipulators, then the connection strength is improved, but contamination of components occurs leading to frequent cleaning or replacement
Solution Approach 1:
The patent applies local quality by generating corresponding surfaces with complementary structures (protrusions and recesses) only at the specific attachment region between the object and manipulator. This localized structural correspondence ensures strong connection through mechanical interlocking and material redeposition only where needed, while preventing precursor deposition and contamination on other components of the manipulator and apparatus.
Solution Approach 2:
The patent converts the harmful effect of precursor deposition into a beneficial process by using the particle beam to ablate and redeposit material specifically in the boundary region between object and manipulator. The precursors that would normally cause contamination are instead directed and controlled to create strong adhesive bonds only at the attachment interface, transforming contamination risk into a controlled bonding mechanism.
2Reliability
If the manipulator is cleaned or replaced frequently due to contamination, then connection reliability is maintained, but productivity decreases
Solution Approach 1:
The patent extracts the contamination problem from the overall system by confining the attachment process to a localized boundary region. By generating corresponding surfaces and redepositing material only at the object-manipulator interface, the method prevents precursor contamination from spreading to other manipulator components, thereby eliminating the need for frequent cleaning or replacement and maintaining high productivity.
3Object-generated harmful factors
If corresponding surfaces are generated using particle beam ablation and redeposition, then contamination-free connection is achieved, but process complexity increases
Solution Approach 1:
The patent applies self-service by using the particle beam to simultaneously perform multiple functions: ablatting material from the object and manipulator surfaces, transporting the ablated material, and redepositing it to form strong adhesive bonds. This self-contained process, combined with the pre-generated corresponding surfaces, creates contamination-free connections without requiring additional external systems or complex multi-step procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides a reliable and contamination-free connection of frozen objects to manipulators, enabling multiple uses of the manipulator without cleaning or replacement, while maintaining the integrity of the object and apparatus components.
Implementation Method 1
at least one first surface to be generated on the manipulator using a particle beam of the particle beam apparatus, with the particle beam including charged particles... at least one second surface to be generated on the object using the particle beam
Implementation Method 2
the first surface and the second surface to be generated in such a way that the second surface corresponds to the first surface... the object to be fastened to the manipulator in a boundary region between the first surface and the second surface
Data Source
AI summary
The invention relates to a method for fastening an object to a manipulator in a particle beam apparatus and for moving the object in the particle beam apparatus. The invention further relates to a computer program product and a particle beam apparatus, which are provided to carry out the method according to the invention. The method according to the invention includes the following steps: generating a first surface on the manipulator using a particle beam of the particle beam apparatus; generating a second surface on the object using the particle beam, in such a way that the second surface corresponds to the first surface; arranging the first surface at the second surface such that the manipulator is arranged at the object; fastening the object to the manipulator in a boundary region between the first surface and the second surface using the particle beam; and moving the object fastened to the manipulator using the manipulator and/or a mobile object stage, on which the object is arranged.