Particle Beam Magnification Control Without Range Switching

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing particle beam apparatuses experience imaging aberrations and errors due to switching between magnification ranges, which are caused by electronic background noise and charge disturbances during magnification adjustments, leading to inaccurate beam guidance and object analysis.

Innovation Solution

A method for operating a particle beam apparatus that involves choosing a magnification within a first range and determining if it deviates from a second range by a specific margin, without switching, while ensuring the number of pixels or pixel size meets certain thresholds, thereby avoiding electronic noise and charge disturbances.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If magnification switching is performed to adjust the particle beam apparatus between different magnification ranges, then the apparatus can adapt to different imaging requirements, but imaging aberrations and errors occur due to electronic background noise and charge disturbances during switching

Engineering Contradiction:
Improvemagnification range adaptabilityVSAvoidimaging accuracy
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent implements dynamic magnification adjustment within a single magnification range rather than switching between discrete ranges. The control unit continuously adjusts the magnification parameter while maintaining the apparatus in one operational range, avoiding the dynamic transitions that cause noise and charge disturbances. This dynamic approach within a fixed range resolves the contradiction by providing adaptability without the reliability penalties of range switching.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent determines in advance whether the desired magnification deviates from the current range by a predefined value before initiating any adjustment. This preliminary check prevents unnecessary switching operations and allows the system to prepare for smooth transitions within the current range only when absolutely necessary, thereby avoiding premature switching that would introduce noise and imaging errors.

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If magnification switching is performed to achieve different imaging scales, then the apparatus can handle diverse analysis requirements, but beam guidance accuracy deteriorates due to electronic background noise during switching

Engineering Contradiction:
Improveimaging scale flexibilityVSAvoidbeam guidance accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The system uses dynamic magnification adjustment within a single operational range, allowing continuous variation of magnification without switching between discrete ranges. This eliminates the electronic background noise associated with range switching while maintaining the ability to achieve different imaging scales, thus preserving beam guidance accuracy while providing imaging scale flexibility.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The control unit acts as an intermediary that manages magnification adjustments by determining whether changes exceed a predefined deviation threshold. When adjustments are needed, it performs them within the current range using intermediate steps rather than direct switching, thereby mediating between the need for scale flexibility and the requirement for beam guidance accuracy by avoiding noisy transition zones.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If magnification range switching is implemented to accommodate different pixel thresholds, then the apparatus can optimize for different object sizes, but charge disturbances occur during switching causing imaging aberrations

Engineering Contradiction:
Improveobject size optimizationVSAvoidcharge disturbances
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The patent implements dynamic magnification adjustment within a single range that can accommodate different object sizes by continuously varying the magnification parameter. This approach allows the apparatus to optimize for different object sizes without performing range switching operations that generate charge disturbances, thereby eliminating imaging aberrations while maintaining object size optimization capability.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The control unit performs a preliminary determination of whether the desired magnification for a given object size exceeds the predefined deviation from the current range. This advance check allows the system to plan adjustments within the current range when possible, preventing charge disturbances from occurring during unnecessary switching operations while still enabling optimization for different object sizes.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach prevents imaging aberrations and ensures accurate beam guidance and analysis by maintaining stable magnification without switching, reducing disturbances and errors in the scanning process.

Implementation Method 1

an analog control signal is generated on the basis of the digital control signal using a digital-to-analog converter

Methodology Applied
Scientific EffectDigital-to-analog conversion:

Implementation Method 2

an analog first amplifier signal is generated on the basis of the analog control signal using a first amplifier unit

Methodology Applied
Scientific EffectElectrical signal amplification:

Implementation Method 3

an analog second amplifier signal is generated on the basis of the analog first amplifier signal using a second amplifier unit

Methodology Applied
Scientific EffectElectrical signal amplification:

Implementation Method 4

The particle beam is then guided over the object using the scanning unit

Methodology Applied
Scientific EffectElectromagnetic deflection: Electromagnetic Induction

Implementation Method 5

a particle beam apparatus for imaging, processing and/or analyzing an object with a particle beam having charged particles

Methodology Applied
Scientific EffectElectron beam generation: Electron Beam

Implementation Method 6

The charged particles are electrons or ions, for example

Methodology Applied
Scientific EffectIon beam generation: Ion Beam

Data Source

PatentUS12476072B2Operating a particle beam apparatus
Publication Date: 2025.11.18 CARL ZEISS MICROSCOPY GMBH
  • US12476072B2 patent drawing
  • US12476072B2 patent drawing
  • US12476072B2 patent drawing

AI summary

A particle beam apparatus is used for imaging, processing and/or analyzing an object. A computer program product may be used to facilitate imaging, processing and/or analyzing the object. A magnification may be chosen from a first magnification range of the particle beam apparatus by driving a first amplifier unit and a second amplifier unit. If it is established that there are prerequisites which would actually result in the particle beam apparatus being switched to a different magnification from a second magnification range, the switching is avoided by feeding an analog amplifier signal from an amplifier unit to a scanning unit of the particle beam apparatus, guiding the particle beam over the object using the scanning unit, and imaging, processing and/or analyzing the object with the particle beam.