Particle Beam Device Marking for Multi-Modal Object Analysis
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Solution Overview
Problem
Existing methods for analyzing objects are limited in their ability to efficiently utilize multiple analysis techniques and devices, making it difficult to collect comprehensive information about objects using a variety of analysis methods and devices.
Innovation Solution
A method involving the use of a particle beam device that introduces a marking into the object or its support material, allowing for easy identification and analysis of specific areas using different analysis methods, including the use of X-ray microscopes and confocal laser scanning microscopes, and the generation of three-dimensional data sets through tomographic methods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If multiple analysis devices and methods are used to examine an object, then comprehensive information about the object is obtained, but the handling and transportation of the object between devices becomes difficult
Solution Approach 1:
The patent combines multiple analysis devices (X-ray microscope, confocal laser scanning microscope, particle beam device) into a single integrated system that can examine the object without requiring physical transportation between separate devices. This merging approach maintains comprehensive information gathering while eliminating handling difficulties.
Solution Approach 2:
The patent creates a universal examination platform that performs multiple analysis functions (X-ray imaging, optical sectioning, electron microscopy) within a single device configuration, allowing comprehensive object analysis without transferring the object between specialized devices.
2Measurement precision
If series tests are performed by sequentially processing and analyzing the object surface, then detailed analysis is achieved, but the examination time increases
Solution Approach 1:
The patent enables continuous examination by maintaining the object in a fixed position while sequentially activating different analysis methods without interruption or repositioning. The object remains stationary throughout the entire examination process, allowing continuous data acquisition from multiple modalities.
Solution Approach 2:
The patent performs preliminary positioning and setup of the object once at the beginning, establishing a fixed examination configuration that allows all subsequent analysis methods to operate on the same prepared sample without repeated setup or repositioning steps.
3Loss of information
If the object is examined using multiple analysis methods, then comprehensive data is collected, but the complexity of coordinating different devices increases
Solution Approach 1:
The patent merges multiple analysis devices into a single integrated system with unified control, eliminating the coordination complexity that would arise from managing separate devices. The integrated design allows comprehensive data collection through centralized operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the easy handling and transportation of objects between analysis devices while allowing for detailed examination using multiple methods, providing high-resolution image data and facilitating the creation of three-dimensional representations of objects.
Implementation Method 1
scanning a first particle beam over the exposed examination area and capturing image data of the uncovered examination area with at least one detector by detecting interaction particles and/or interaction radiation due to an interaction of the first particle beam with the uncovered examination area
Implementation Method 2
introducing a marking into the object to be analyzed or into a support material in which the object to be analyzed is embedded
Implementation Method 3
exposing the examination area by removing material from the object and/or the support material
Implementation Method 4
The examination area is determined in the three-dimensional data set of the object... generating a three-dimensional data set of the object with a tomographic method
Data Source
Figure 1A
Figure 1B
Figure 1C
AI summary
The invention relates to a method for generating image data relating to an object (100) and to a particle beam device for carrying out this method. In the method, a marking (103, 104) is arranged in the object or in the support material for the object, at least one examination region (105) of the object is determined, the examination region is exposed by removing material of the object and/or of the support material, a first particle beam is guided over the exposed examination region, and image data relating to the exposed examination region (106) are acquired using a detector (22, 23) by detecting interaction particles and/or interaction radiation on account of interaction between the first particle beam and the exposed examination region. In this case, the examination region can be determined by means of a tomographic method, by means of x-ray microscopy or by means of laser scanning microscopy.