Particle Beam Microscope Sample Positioning via Surface Model
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Solution Overview
Problem
The positioning of samples in particle beam microscopes, such as scanning electron microscopes, is complicated due to the lack of direct visual observation, leading to inaccuracies and potential collisions with components, especially when handling complex geometries or multiple objects, requiring significant experience and time.
Innovation Solution
A method that involves detecting light rays or particles from the sample and object holder to generate a surface model, determining its position and orientation, and using this data to accurately position the sample relative to the objective lens, enabling precise and efficient positioning even for inexperienced users.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a vacuum vessel without windows is used to maintain vacuum, then vacuum integrity is improved, but visual observation capability deteriorates
Solution Approach 1:
The patent introduces a COD-camera as an intermediary device that captures images through the objective lens to provide visual feedback to the operator. This mediator enables observation without compromising the vacuum seal, as no physical window is needed in the vacuum vessel wall.
Solution Approach 2:
The patent creates a visual copy (image) of the sample and chamber interior using the COD-camera system. This copy is displayed on a monitor, allowing the operator to observe the positioning process without direct line-of-sight through the vacuum chamber.
2Measurement precision
If the object is positioned close to the objective lens to improve resolution, then measurement precision is improved, but the viewing angle is obstructed by the objective lens and detectors
Solution Approach 1:
The patent transitions from two-dimensional camera observation to three-dimensional positioning information provided by the COD-camera system. The 3D surface model and position data allow accurate positioning even when the object is close to the lens, overcoming the viewing angle limitation.
3Reliability
If manual positioning is used to avoid collisions, then reliability is improved, but productivity deteriorates due to time consumption and experience requirements
Solution Approach 1:
The patent implements a feedback system where the COD-camera continuously provides visual information about object position and orientation. This real-time feedback enables operators to position samples accurately and quickly without risking collisions, eliminating the need for extensive experience.
Solution Approach 2:
The system provides self-guided positioning through the COD-camera display, allowing operators to independently position samples without requiring expert knowledge. The visual feedback serves the operator, enabling intuitive and safe positioning operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for high-accuracy and fast positioning of samples relative to the objective lens, reducing the risk of collisions and improving operational efficiency, enabling inexperienced users to conduct measurements quickly and accurately.
Implementation Method 1
detecting light rays and/or particles, which emanate from a structure, wherein the structure comprises at least a portion of a surface of an object and/or at least a portion of a surface of an object holder
Data Source
AI summary
A method for operating a particle beam microscope comprising detecting light rays or particles which emanate from a structure, wherein the structure comprises at least one of: at least a portion of a surface of an object and at least a portion of a surface of an object holder of the particle beam microscope; generating a surface model of the structure depending on the at least one of the detected light rays and the particles; determining a position and an orientation of the surface model of the structure relative to the object region; determining a measurement location relative to the surface model of the structure; and positioning the object depending on the generated surface model of the structure, depending on the determined position and orientation of the surface model of the structure, and depending on the determined measurement location.