Multiple Particle Beam System Mirror Mode Operation
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Solution Overview
Problem
Existing multiple particle beam systems lack effective options for system monitoring and recalibration, particularly in continuous operation with high throughput, and have not utilized mirror modes of operation effectively, which are crucial for defect recognition and characterization in semiconductors and other materials.
Innovation Solution
A multiple particle beam system is designed with a micro-optical unit, particle optical units, a detection system, and a controller to operate in both normal and mirror modes, allowing for adjustable sample region voltage to direct particle beams for incident or reflected operation, enabling flexible system monitoring and recalibration without significant disruption to normal operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple particle beam systems operate continuously with high throughput, then productivity is improved, but system reliability deteriorates due to lack of effective monitoring and recalibration options
Solution Approach 1:
The patent implements a mirror mode that enables preliminary system monitoring and defect detection before actual processing. The mirror beam reflects off the sample surface without causing damage, allowing the system to check for defects, contamination, or calibration issues in advance, thereby maintaining reliability during continuous high-throughput operation.
Solution Approach 2:
The mirror beam acts as an intermediary mechanism that enables system monitoring without disrupting normal processing. By using a separate mirror beam path that reflects off the sample surface, the system can perform calibration checks and defect detection independently from the main processing beams, resolving the contradiction between continuous operation and monitoring needs.
2Reliability
If mirror mode of operation is implemented for system monitoring, then reliability is improved, but device complexity increases
Solution Approach 1:
The patent makes the existing particle beam system multi-functional by enabling it to operate in both normal processing mode and mirror monitoring mode using the same hardware components. The beam switching mechanism allows the system to alternate between these modes without requiring separate dedicated monitoring equipment, thus improving reliability while minimizing additional complexity.
Solution Approach 2:
The system performs self-diagnosis and self-calibration through the mirror mode, where the reflected beam from the sample surface provides information about system state, alignment, and potential defects. This self-service capability improves reliability without requiring complex external monitoring systems or additional operational procedures.
3Adaptability or versatility
If beam switching between normal and mirror modes is implemented, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent implements dynamic beam switching that allows the system to transition between normal processing mode and mirror monitoring mode as needed. The switching mechanism is controlled dynamically based on operational requirements, enabling the system to adapt to different tasks (processing vs. monitoring) while using a unified hardware platform, thus improving adaptability with controlled complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides enhanced monitoring and recalibration capabilities, allowing for efficient defect recognition and characterization in high-throughput operations, improving the reliability and flexibility of multiple particle beam systems by integrating mirror modes for system maintenance and inspection.
Implementation Method 1
a particle source (301) which is configured to generate a first charged particle beam (3)
Implementation Method 2
a first particle optical unit with a first particle optical beam path (13), which is configured to direct the generated individual particle beams (3)
Implementation Method 3
a sample region voltage supply (10.2), which is configured to provide an adjustable sample region voltage (USample)
Data Source
AI summary
A multiple particle beam system with a mirror mode of operation, a method for operating a multiple particle beam system with a mirror mode of operation and an associated computer program product are disclosed. The multiple particle beam system can be operated in different mirror modes of operation which allow the multiple particle beam system to be inspected and recalibrated thoroughly. A detection system configured to operate in a first detection mode and/or in a second detection mode is used for the analysis.