Particle Beam Image Generation with Multi-Direction Scanning
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Solution Overview
Problem
Particle beam systems, such as electron and ion beam microscopes, face challenges in generating high-quality images due to charging artifacts caused by objects with low electric conductivity or non-conductive regions, which existing techniques often address at the cost of reducing signal-to-noise ratios.
Innovation Solution
The method involves recording multiple primary images of an object using a particle beam system with scan directions differing by at least 10°, and generating a result image by averaging corresponding image locations across these images to mitigate charging artifacts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the primary particle beam scans across the object to generate images, then image data is obtained, but charging artifacts occur in regions of low electric conductivity or non-conductive regions
Solution Approach 1:
The patent segments the image acquisition process into multiple separate scans with different scan directions. Instead of acquiring all image data in a single scan direction, the method divides the measurement into multiple passes, each contributing a portion of the final image. This segmentation allows charging artifacts to be distributed and reduced across multiple measurements, improving image quality while minimizing charging effects on non-conductive regions.
Solution Approach 2:
The patent employs periodic scanning actions with alternating or varied scan directions. By periodically changing the scan direction between different image acquisitions, the method prevents continuous charging in the same direction that would accumulate artifacts. This periodic variation in scan direction distributes the charging effects and enables artifact reduction through subsequent image processing.
2Object-affected harmful factors
If faster scanning is used to reduce charging, then charging is reduced, but signal-to-noise ratio decreases and image quality diminishes
Solution Approach 1:
The patent segments the total scanning time into multiple separate scans with different directions, allowing each scan to be optimized for adequate signal collection. Rather than using a single fast scan that compromises signal-to-noise ratio, the method performs multiple slower scans that each contribute to the final image, maintaining high signal quality while reducing charging artifacts through directional variation.
Solution Approach 2:
The patent maintains continuous useful action by performing multiple scans that all contribute to the final image quality. Each scan, regardless of direction, provides valuable signal data that is integrated into the result image. This continuous accumulation of signal from multiple scans ensures high signal-to-noise ratio while the variation in scan directions continuously reduces charging artifacts.
3Measurement precision
If multiple images are recorded with different scan directions, then charging artifacts are reduced, but measurement time increases
Solution Approach 1:
The patent segments the image acquisition into multiple scans with different directions, where each scan captures a portion of the final image data. By strategically selecting scan directions and optimizing the number of scans, the method achieves charging artifact reduction without requiring an excessive number of scans, thus balancing measurement time with image quality improvement.
Solution Approach 2:
The patent changes the scan direction parameter between different image acquisitions to reduce charging artifacts. By varying this parameter systematically rather than repeating identical scans, the method achieves artifact reduction more efficiently. The controlled variation of scan direction parameters allows for effective charging mitigation while minimizing the total number of scans required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces charging artifacts in the result image while maintaining signal quality, improving image clarity by averaging image values from multiple scans with varying directions.
Implementation Method 1
secondary particles generated by the interaction of the primary particle beam with the object
Implementation Method 2
The primary particle beam is scanned across the object and secondary particles generated by the interaction of the primary particle beam with the object are detected
Data Source
AI summary
A method of generating a result image of an object using a particle beam system includes recording multiple primary images of a region of the object using the particle beam system. Recording of each of the primary images includes scanning the primary particle beam along a scan direction across the region and detecting secondary particles generated thereby. The scan directions used for recording at least one pair of two of the primary images differ at least by a first threshold value of at least 10°. The method also includes generating, based on the multiple primary images, the result image representing the region of the object.