Particle Beam Positioning Device Coaxial Light Alignment
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Solution Overview
Problem
Existing particle beam apparatuses are limited in their ability to precisely position objects at varying working distances, as they require the object stage to be adjusted within a predefined distance to achieve accurate positioning.
Innovation Solution
A positioning device for particle beam apparatuses that includes a positionable holder adjustable in multiple directions, equipped with a light source and detector to guide a light beam coaxially with the particle beam, allowing precise positioning at any working distance by ensuring the light beam and particle beam run approximately coaxially, with an angle of less than or equal to 15°, and incorporating deflection elements and a deflector to align the beams.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the object stage is adjusted within a predefined distance to achieve accurate positioning, then positioning precision is improved, but adaptability to different working distances deteriorates
Solution Approach 1:
The patent applies dynamics by making the holder adjustable in multiple directions (x, y, z translations plus rotations) rather than fixed at a predefined distance. This dynamic positioning capability allows the holder to adapt to any working distance while maintaining positioning precision through active adjustment mechanisms.
Solution Approach 2:
The patent changes the parameter of working distance from a fixed predefined value to a variable parameter that can be adjusted freely. By enabling continuous adjustment of the holder's position and orientation, the system can operate at any working distance while preserving positioning accuracy through coordinated control of multiple adjustment degrees of freedom.
2Measurement precision
If a light source and detector are added to guide the light beam coaxially with the particle beam, then beam alignment precision is improved, but device complexity increases
Solution Approach 1:
The patent introduces a light beam as an intermediary to achieve coaxial alignment between the particle beam and the holder. The light source and detector create a visible reference beam that mediates the alignment process, allowing precise positioning without requiring direct measurement of particle beam coordinates.
Solution Approach 2:
The patent replaces complex mechanical alignment systems with an optical alignment system using light sources and detectors. Instead of relying on mechanical fixtures and manual adjustment, the system uses optical fields to guide and verify coaxial alignment, simplifying the overall device architecture while improving precision.
3Adaptability or versatility
If the holder is made adjustable in multiple directions to enable positioning at any working distance, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent segments the positioning function into multiple independent adjustment mechanisms, each responsible for a specific degree of freedom (x-position, y-position, z-position, rotations). This segmentation allows complex multi-directional adjustment to be achieved through simpler, modular components rather than a single complex mechanism.
Solution Approach 2:
The patent creates a universal holder design that can perform multiple functions: positioning at any working distance, orienting the object in any direction, and maintaining coaxial alignment with the particle beam. By integrating multiple adjustment capabilities into a single holder assembly, the system achieves versatility without proportionally increasing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and precise positioning of objects at any predefined working distance, allowing for effective illumination and cleaning of the object surface while maintaining accurate alignment of the light and particle beams.
Implementation Method 1
at least one light source (15) for generating a light beam (B)
Implementation Method 2
at least one detector (16) for detecting the light beam (B)
Data Source
AI summary
A positioning device and a particle beam apparatus including a positioning device ensure reliable positioning of a holder for holding an object at any working distance. The positioning device includes a positionable holder for holding the object. A light source generates a light beam which is guided in the direction of the positionable holder. A detector detects the light beam. An injection area injects particles of a particle beam such that they are guided in the direction of the positionable holder. The light beam passes the injection area. The injection area has an output side for the light beam and the particle beam, which is directed toward the holder. The detector includes a detector element situated in an area between the output side and the holder. The light source includes a light source element situated in an area which extends away from the holder, starting from the output side.