Particle Beam Raster Point Layout for Uniform Surface Scanning

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Solution Overview

Problem

Conventional methods for scanning a surface with a particle beam often result in non-uniform particle dose distribution and poor approximation of the surface contour, especially when trying to achieve precise edge definitions in surface manipulation tasks like creating indentations or projections.

Innovation Solution

A method where the initial positions of raster points are determined based on the shape of the surface portion, with subsequent points placed adjacent to previous ones, and their positions adjusted to ensure a uniform particle dose distribution, allowing for a more accurate representation of the surface contour by changing positions of raster points within the surface portion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional raster scan methods are used to scan the surface line by line, then the scanning process is simple and fast, but the particle dose distribution becomes non-uniform and the surface contour approximation is poor

Engineering Contradiction:
Improvesurface contour approximationVSAvoidscanning method complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The surface portion to be scanned is divided into multiple discrete raster points rather than continuous lines. Each raster point is independently positioned and processed, allowing precise control over the beam placement to accurately follow the surface contour while maintaining manageable process complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The distance between adjacent raster points is adjusted locally based on the curvature and geometry of the surface contour. In regions requiring higher precision or tighter curvature, the raster point density is increased, while in flatter regions the spacing can be larger, optimizing both accuracy and processing efficiency

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If raster points are placed in a regular grid pattern, then the scanning is straightforward, but the particle dose distribution becomes non-uniform across the surface

Engineering Contradiction:
Improveparticle dose uniformityVSAvoidraster point positioning
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The raster point positions are made dynamic rather than fixed in a regular grid. The positions are adjusted based on the local geometry and required dose distribution, allowing the system to adapt to different surface shapes and processing requirements while maintaining ease of operation through automated calculation

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system incorporates feedback mechanisms where the expected particle dose distribution is calculated based on the raster point arrangement, and the positions are iteratively adjusted to achieve uniform dose distribution. This feedback loop ensures both dose uniformity and operational simplicity

Inventive Principle:
Principle #23Feedback

3Manufacturing precision

If the particle beam is directed to predetermined raster points in sequence, then the processing is efficient, but the edge definition of features becomes inaccurate

Engineering Contradiction:
Improveedge definition accuracyVSAvoidprocessing efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The positions of the raster points are pre-calculated and optimized before the actual scanning process begins. The initial positions are determined based on the desired surface contour and feature geometry, allowing the beam to follow precise paths that accurately define edges and features while maintaining efficient sequential processing

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The parameters of the raster points (positions, spacing, density) are changed and optimized to match the specific geometric requirements of the features being created. This allows accurate edge definition for different feature types while maintaining processing efficiency through parameter optimization

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach leads to a more homogeneous particle dose distribution across the surface, enabling the creation of structures with well-defined edges that accurately match the desired contour, reducing deviations from the target dose and improving the precision of surface manipulation tasks.

Implementation Method 1

a particle beam can be directed onto a surface of an object to remove material from the object

Methodology Applied
Scientific EffectParticle beam interaction: Ion Beam

Implementation Method 2

products of the activation form compounds with particles of the object which are removed from the object

Methodology Applied
Scientific EffectChemical compound formation: Chemical Bonding

Data Source

PatentEP2669928B1Method and apparatus for scanning a surface of an object using a particle beam
Publication Date: 2024.02.21 CARL ZEISS MICROSCOPY GMBH
  • EP2669928B1 patent drawingFigure 1
  • EP2669928B1 patent drawingFigure 2
  • EP2669928B1 patent drawingFigure 3

AI summary

A method of scanning a surface of an object using a particle beam comprises: determining a surface portion of the surface of the object, wherein the surface portion is to be scanned; determining initial positions of a set of raster points within the surface portion; changing the positions of at least some raster points of the set of raster points; and then scanning the surface portion by directing the particle beam to the positions of the raster points.