Particle Beam Raster Scanning Order for Homogeneous Surface Processing
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Solution Overview
Problem
Conventional methods for raster scanning particle beams across miniaturized objects' surfaces do not effectively fulfill expectations, particularly in achieving homogeneous processing and preventing material deposition issues during material removal.
Innovation Solution
A method where raster points are ordered based on their distance from the surface boundary, with the particle beam scanning from the outside in or inside out, ensuring that points closer to the boundary are scanned first to minimize material deposition at already processed regions, and using a flexible lattice arrangement for raster point placement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional line scan method is used to raster scan the surface, then the scanning process is simple and predetermined, but the processing homogeneity is poor and material deposition occurs at already processed regions
Solution Approach 1:
The patent applies preliminary action by pre-calculating and storing an optimal scanning order in a lookup table before the actual raster scanning process. The scanning order is determined based on distance metrics from boundary points, and this predetermined order is then retrieved during processing to guide the particle beam scanning sequence, avoiding material deposition at already processed regions while maintaining processing homogeneity
Solution Approach 2:
The patent implements dynamics by making the scanning order adaptive rather than fixed. The scanning sequence dynamically adjusts based on the distance of each raster point from the boundary of the surface portion, with points closer to the boundary being scanned later. This dynamic reordering prevents material deposition issues while maintaining processing uniformity across different surface geometries
2Manufacturing precision
If raster points are scanned in predetermined order from left to right and top to bottom, then the scanning sequence is simple to implement, but material removed at one location is deposited at other locations causing poor edge definition
Solution Approach 1:
The patent applies preliminary action by pre-calculating the optimal scanning order that prioritizes boundary points before interior points. This scanning sequence is stored in advance and retrieved during processing, ensuring that material removal at interior locations does not subsequently deposit on already processed boundary regions, thereby achieving well-defined edges without requiring real-time optimization
Solution Approach 2:
The patent implements local quality by applying different scanning priorities to different regions of the surface. Boundary points are assigned higher priority in the scanning sequence compared to interior points, creating a localized scanning strategy that ensures proper edge definition while maintaining efficient overall processing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in a well-defined edge during material removal and achieves relatively homogeneous processing by directing the particle beam to raster points in an order that prioritizes those closer to the boundary, reducing material deposition at scanned regions and enhancing processing uniformity.
Implementation Method 1
The particle beam can be an electron beam or an ion beam
Implementation Method 2
a particle beam can be directed onto the surface of the object in order to remove material from the object
Implementation Method 3
deposit material on the object at the location of incidence of the particle beam
Implementation Method 4
reaction products of the process gas are deposited on the surface of the object at the location of incidence of the particle beam
Data Source
AI summary
A method of raster scanning a surface of an object using a particle beam comprises determining a basic set of raster points within a surface; determining a surface portion of the surface of the object, wherein the surface portion is to be raster scanned; ordering a set of raster points of the basic set located within the surface portion; and scanning of the surface portion by directing the particle beam onto the raster points of the ordered set in an order corresponding to an order of the raster points in the ordered set from the outside to the inside, i.e. starting from the boundary of the surface portion towards its center, or in the reverse order, i.e. from the inside to the outside.