Autonomous Particle Beam Region Adaptation for In-Situ Deformation
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Solution Overview
Problem
In-situ experiments in particle beam devices, such as SEMs, require manual operator control to coordinate multiple devices and correlate imaging and processing tasks, making the process complex and labor-intensive, especially during deformation experiments where forces and temperatures need to be applied and monitored.
Innovation Solution
A method that automates the process by identifying regions of interest, defining analyzing and processing sequences, and adapting these regions based on the sequences, allowing for autonomous operation of particle beam devices to perform imaging, analysis, and processing without continuous operator intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual operator control is used to coordinate multiple devices and correlate imaging and processing tasks, then flexibility and adaptability are maintained, but the process becomes complex and labor-intensive
Solution Approach 1:
The system enables autonomous operation where the particle beam device automatically coordinates imaging and processing tasks without continuous operator intervention. The control unit manages the workflow autonomously, allowing the system to serve itself by automatically adjusting parameters and sequencing operations based on pre-defined experimental protocols.
Solution Approach 2:
The system incorporates feedback mechanisms where the control unit continuously monitors the state of the object and adjusts imaging and processing parameters accordingly. This closed-loop control enables automatic adaptation during experiments, reducing manual intervention while maintaining operational flexibility through real-time parameter adjustment based on detected conditions.
2Productivity
If automated sequences are implemented for imaging and processing, then productivity and efficiency are improved, but the need for operator control and adaptability may be reduced
Solution Approach 1:
The system employs dynamic control where automated sequences can be adjusted and modified during operation. The control unit allows for real-time modification of experimental protocols, enabling the system to adapt to unexpected conditions or new experimental requirements while maintaining the efficiency benefits of automation. This dynamic capability ensures both high productivity and operational flexibility.
Solution Approach 2:
The particle beam device is designed with multi-functional capability, integrating both imaging and processing functions in a single system. This universal design allows the same automated control unit to manage diverse experimental protocols, from imaging-only sequences to combined imaging-processing-experiment workflows, thereby maintaining versatility while achieving high productivity through automation.
3Measurement precision
If multiple devices are coordinated for in-situ experiments, then comprehensive analysis capability is achieved, but the ease of operation decreases due to the need to control and correlate multiple devices
Solution Approach 1:
The system merges multiple devices and functions into a single integrated particle beam device. The control unit consolidates control over imaging systems, processing units, and experimental apparatus into one unified interface, enabling comprehensive data correlation while simplifying operation. This integration maintains high measurement precision through coordinated multi-functional operation while reducing the operational complexity of managing separate devices.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This automation optimizes the workflow for in-situ experiments, reducing the need for manual control and enabling more efficient and precise imaging and analysis during deformation experiments by automatically adjusting regions of interest and managing processing tasks.
Implementation Method 1
a particle beam generator (402) for generating a primary particle beam (409) comprising charged particles
Implementation Method 2
The charged particles may be electrons and/or ions
Implementation Method 3
at least one objective lens (421) for focusing the primary particle beam (409) onto the object (425)
Implementation Method 4
The primary electron beam is guided over a surface of the object to be examined by means of a deflection device. This is also referred to as scanning. The area scanned by the primary electron beam is also referred to as scanning region. The electrons of the primary electron beam interact with the object to be examined. Interaction particles and/or interaction radiation result as a consequence of the interaction.
Implementation Method 5
By way of example, the interaction radiation is X-ray radiation or cathodoluminescence
Implementation Method 6
The primary electron beam is guided over a surface of the object to be examined by means of a deflection device. This is also referred to as scanning.
Data Source
AI summary
A method of operating a particle beam device for imaging, analyzing and/or processing an object may be carried out, for example, by a particle beam device. The method may include: identifying at least one region of interest on the object; defining: (i) an analyzing sequence for analyzing the object, (ii) a processing sequence for processing the object by deformation and (iii) an adapting sequence for adapting the at least one region of interest depending on the processing sequence and/or on the analyzing sequence; processing the object by deformation according to the processing sequence and/or analyzing the object according to the analyzing sequence; adapting the at least one region of interest according to the adapting sequence; and after or while adapting the at least one region of interest, imaging and/or analyzing the at least one region of interest using a primary particle beam being generated by a particle beam generator.