Particle Beam Sample Opening for High-Resolution Analysis
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Solution Overview
Problem
Current methods for analyzing samples in particle beam devices are prone to contamination, time-consuming, and risk sample damage due to the need to transfer samples between devices, and offer limited spatial resolution due to oblique angles of examination.
Innovation Solution
A method where a particle beam is used to create an opening in the sample material adjacent to the area of interest, allowing for the separation and detailed examination of the sample without transfer, using backscattered particles for analysis, enabling perpendicular beam incidence and reducing contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the part of the sample to be analyzed is taken out of the first particle beam device and taken into a second particle beam device, then detailed examination can be performed, but the sample part may be contaminated, damaged, and the process becomes very time-consuming
Solution Approach 1:
The patent combines the sample preparation function (ion beam column) and the examination function (electron beam column) into a single particle beam device. This merging eliminates the need to transfer the sample part between different devices, thereby preventing contamination and damage during transfer while significantly reducing the time required for the analysis process.
2Reliability
If the part of the sample to be analyzed is examined in the first particle beam device from an oblique angle, then the sample does not have to be taken out, but the spatial resolution is impaired and images may be distorted
Solution Approach 1:
The patent employs a movable sample holder that can dynamically adjust the orientation and position of the sample part. This allows the sample to be positioned at optimal angles for examination, enabling high spatial resolution imaging while keeping the sample part securely mounted and preventing the need for physical transfer that could compromise sample integrity.
3Measurement precision
If a thin sample slice of only a few nm thickness is generated for transmission analysis, then transmission examination is possible, but the sample generation becomes very complicated
Solution Approach 1:
The patent uses an ion beam column to segment and locally remove material from the sample, creating precisely defined openings or thinning specific regions. This segmented approach allows for controlled sample preparation where only the necessary areas are thinned or removed, making the sample generation process more manageable and less complicated while still achieving the required thickness for transmission analysis.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies sample generation and analysis, enhances spatial resolution, and reduces the risk of sample damage by allowing examination within the same vacuum chamber without the need for sample transfer, thus improving efficiency and accuracy.
Implementation Method 1
analyzed by detecting the particles backscattered from the part of the sample to be analyzed or emitted from the part of the sample to be analyzed
Implementation Method 2
an opening is introduced in the sample material with the aid of a particle beam
Data Source
AI summary
A device and method for analyzing a sample provide for extracting a part to be analyzed from the sample with the aid of a previously generated opening in the sample. The part to be analyzed is examined in greater detail with the aid of a particle beam. For this purpose, the sample is placed in the opening or on a sample holder.