Particle Beam Tip Fabrication With Markerless Laser Pre-Ablation
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Solution Overview
Problem
Current methods for producing tips for atom probe tomography are time-consuming due to low ablation rates, and using reference markings for ion beam positioning becomes impractical during extensive material removal, as these markings are also ablated, losing their effectiveness.
Innovation Solution
A method that combines extensive material ablation using a laser with fine ablation by an ion beam, allowing for precise positioning of the particle beam without relying on external reference markings, by determining the region of interest and ablating material in a controlled geometric pattern to efficiently create the desired shape.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If ion beam ablation is used to produce tips for atom probe tomography, then manufacturing precision is improved, but productivity deteriorates due to low ablation rates
Solution Approach 1:
The tip production process is segmented into two distinct stages: a roughing stage using laser ablation to remove bulk material quickly, and a finishing stage using ion beam ablation to achieve precise tip geometry. This segmentation allows each method to optimize for its specific function, resolving the contradiction between speed and precision
Solution Approach 2:
Laser ablation is performed as a preliminary action before ion beam ablation to pre-remove the majority of material. This preliminary action reduces the workload for the subsequent precision ion beam step, enabling fast bulk removal while preserving time for accurate final shaping
2Measurement precision
If reference markings are used for ion beam positioning, then positioning accuracy is improved, but reliability deteriorates during extensive material removal as markings are ablated
Solution Approach 1:
A markerless optical measurement system acts as an intermediary to establish the relationship between the object coordinate system and beam coordinate system before ablation begins. This intermediary measurement approach eliminates the need for physical reference markings that would be destroyed during extensive material removal, maintaining both positioning accuracy and reliability throughout the process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required to produce tips for atom probe tomography by enabling both extensive and fine material removal within the object, maintaining precise positioning of the particle beam and avoiding the need for external reference markings.
Implementation Method 1
extensive ablation of material of the object, for example of the order of several 100 μm, and fine ablation of material of the order of several nm
Implementation Method 2
fine ablation of material of the order of several nm
Data Source
AI summary
Processing an object using a material processing device with a particle beam apparatus includes determining a region of interest of the object on or in a first material region of the object, ablating material from a second material region adjoining the first material region using an ablation device, and recognizing a geometric shape of the first material region. The geometric shape has a center. Processing the object also includes ablating material from a second portion of the first material region adjoining a first portion using a particle beam, the first portion having a first subregion and a second subregion, the region of interest being arranged in the first subregion, recognizing a further geometric shape of the first material region, positioning the object such that the first position corresponds to a center of the further geometric shape, and ablating material from the second subregion using the particle beam.