Particle Beam Velocity Squeezer for High-Capture Monochromatic Beams

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Solution Overview

Problem

Existing particle beam shaping technologies suffer from low efficiency and high particle loss due to broad velocity distributions, leading to inefficient monochromatic or polychromatic beam production, which is necessary for applications requiring intense and focused particle beams.

Innovation Solution

A particle beam velocity squeezer system using electromagnetic radiation sources and a magnetic field to Zeeman-shift resonant frequencies, allowing for the capture and convergence of particles into a narrow velocity distribution, producing intense monochromatic or bichromatic beams with reduced particle loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional velocity shapers like Zeeman slowers are used, then some degree of monochromacity is achieved, but particle loss across the beam line is large and intensity is reduced

Engineering Contradiction:
ImprovemonochromacityVSAvoidparticle loss
Core Design Contradiction:
Manufacturing precisionVSLoss of substance

Solution Approach 1:

The velocity selection process is divided into multiple discrete velocity ranges, each handled by a separate capture region with specific laser detunings and magnetic field strengths. This allows different velocity groups to be captured and slowed independently, reducing overall particle loss while maintaining monochromacity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system dynamically adjusts laser detuning parameters and magnetic field strengths across different capture regions to optimize velocity capture efficiency. By changing these parameters spatially, the system achieves high monochromacity while minimizing particle loss through optimized resonance conditions at each stage.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If monochromators filter wavelengths to achieve monochromatic beams, then wavelength separation is improved, but flux throughput is reduced and efficiency is low

Engineering Contradiction:
Improvewavelength separationVSAvoidflux throughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces traditional mechanical/optical filtering mechanisms with a field-based approach using electromagnetic radiation and magnetic fields to selectively interact with particles based on their velocity. This substitution eliminates the need for physical slits and filters, maintaining flux throughput while achieving wavelength separation through resonance conditions.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

Instead of physically filtering particles, the system changes the resonance parameters of the electromagnetic radiation and magnetic fields to selectively capture particles with specific velocities. This parameter-based selection maintains high flux throughput while achieving the desired monochromatic output.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If velocity distribution is broad in incoming beams, then particle beam sources are simple, but the beam is not suitable for applications requiring intense monochromatic beams

Engineering Contradiction:
Improvebeam source simplicityVSAvoidvelocity distribution quality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The system performs preliminary velocity selection and slowing in multiple capture regions before the particles reach the final extraction point. This preliminary action shapes the velocity distribution early in the process, transforming a broad distribution into a narrow monochromatic beam while maintaining source simplicity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces electromagnetic radiation and magnetic fields as intermediary elements that mediate between the simple particle source and the required monochromatic beam. These intermediaries enable velocity shaping without requiring complex modifications to the particle source itself.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves a high capture efficiency of incoming particles, resulting in a monochromatic or bichromatic beam with reduced particle loss and a shorter device length, enhancing applicability in applications requiring focused particle beams.

Implementation Method 1

A first electromagnetic radiation source (11) arranged to provide a first beam of coherent light (11a) in the beam direction, a second electromagnetic radiation source (21) arranged to provide a second beam of coherent light (21a) opposite the beam direction z

Methodology Applied
Scientific EffectLight pressure: Radiation Pressure

Implementation Method 2

using electromagnetic radiation sources and a magnetic field to Zeeman-shift resonant frequencies

Methodology Applied
Scientific EffectZeeman effect: Zeeman Effect

Data Source

PatentEP4618107A1Particle beam velocity squeezer and a method for velocity squeezing a particle beam
Publication Date: 2025.09.17 LACE LITHOGRAPHY AS
  • EP4618107A1 patent drawingFigure 1~2
  • EP4618107A1 patent drawingFigure 3~4
  • EP4618107A1 patent drawingFigure 5a~5b

AI summary

A particle beam velocity squeezer and a method for velocity squeezing an incoming particle beam (b) with a beam direction z, wherein the particle beam velocity squeezer comprises; - a first electromagnetic radiation source (11) arranged to provide a first beam of coherent light (11a) in the beam direction, - a second electromagnetic radiation source (21) arranged to provide a second beam of coherent light (21a) opposite the beam direction z, wherein the first and second beam of coherent lights coincide at least partly with the particle beam (b).