Particle Concentration Measurement via Aerosolization
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Solution Overview
Problem
Current technologies are inadequate for accurately measuring the concentration and size distribution of small particles (sub 50 nm) in high purity liquids and particle retention by filters, particularly those with small pore sizes, as well as determining particle size distributions in colloidal suspensions, which are crucial for semiconductor manufacturing and ink production.
Innovation Solution
A method and apparatus involving a nebulizer/impactor system that generates small, uniformly sized droplets, followed by evaporation and counting/sizing of particles using instruments like condensation particle counters and scanning mobility particle sizers, allowing for precise measurement of low concentrations and size distributions of particles down to 20-30 nm.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If single particle optical particle counters (OPCs) are used to measure particle concentrations, then particle counting capability is provided, but measurement precision deteriorates for particles smaller than 300 nm due to insufficient light scattering signal
Solution Approach 1:
The patent introduces an intermediary substance (aerosolizing agent or carrier gas) that facilitates the transport and detection of small particles. By aerosolizing the liquid sample and using a carrier gas to deliver particles to the detection region, the system enables effective measurement of sub-300 nm particles that would otherwise be undetectable due to insufficient light scattering signal.
Solution Approach 2:
The patent changes the physical state of the sample from liquid to aerosol, and adjusts detection parameters (such as laser wavelength, detection threshold, and flow rate) to optimize sensitivity for small particles. This parameter change enables the detection of particles smaller than 300 nm by enhancing their optical scattering signal.
2Measurement precision
If measurement methods are developed for sub-50 nm particles, then measurement precision improves for small particles, but device complexity increases due to the need for specialized instruments
Solution Approach 1:
The patent designs a measurement system that can handle multiple particle sizes and concentrations within a single instrument. By using adjustable detection parameters and universal sample introduction (aerosolization), the same device can measure particles from 20 nm to 300 nm, eliminating the need for multiple specialized instruments and reducing overall system complexity.
Solution Approach 2:
The patent employs dynamic adjustment capabilities in the measurement system, allowing real-time modification of detection parameters (such as threshold settings and flow rates) to adapt to different particle sizes and concentrations. This dynamic flexibility enables accurate measurement of sub-50 nm particles without requiring complex fixed-configuration instruments.
3Measurement precision
If filter retention measurement is performed for small pore size filters, then measurement precision improves for filter performance characterization, but difficulty of detecting and measuring increases due to small pore dimensions
Solution Approach 1:
The patent uses an aerosolized sample as an intermediary that can be effectively filtered through small pore size filters. By introducing particles in aerosol form, the system enables accurate measurement of filter retention for filters with pore sizes smaller than 50 nm, as the aerosol particles can be effectively captured and counted on the filter surface.
Solution Approach 2:
The patent replaces direct mechanical filtration testing with an optical detection method. Instead of mechanically analyzing filter performance, the system uses optical particle counting to measure particle retention, enabling precise characterization of filters with small pore sizes that are difficult to analyze using traditional mechanical methods.
4Measurement precision
If particle concentration measurement is performed in high purity liquids, then measurement precision improves for low concentration detection, but loss of substance increases due to the need for careful sample handling and preparation
Solution Approach 1:
The patent introduces an aerosolizing agent or carrier gas as an intermediary that enables sample introduction without direct contact with the liquid sample. By aerosolizing the liquid, the system allows for careful handling and minimal sample loss while maintaining the ability to detect low concentrations of particles through the aerosolized form.
Solution Approach 2:
The patent changes the sample state from liquid to aerosol, which allows for more precise control during introduction and measurement. This parameter change enables detection of low concentrations without requiring large sample volumes, thereby reducing sample loss while maintaining measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient measurement of particle concentrations and size distributions in high purity liquids and colloidal suspensions, improving semiconductor manufacturing yield and ink quality by effectively detecting and sizing small particles that previous methods could not reliably measure.
Implementation Method 1
A method and apparatus involving a nebulizer/impactor system that generates small, uniformly sized droplets
Implementation Method 2
followed by evaporation and counting/sizing of particles
Implementation Method 3
counting/sizing of particles using instruments like condensation particle counters
Implementation Method 4
scanning mobility particle sizers, allowing for precise measurement of low concentrations and size distributions
Data Source
AI summary
A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.