Particle Occurrence Factor Detection in Substrate Processing
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Solution Overview
Problem
In substrate processing systems, determining the occurrence factors of particles that adhere to wafers is challenging due to the need for specialized knowledge, often requiring a manufacturer's technician, which is not always available at the customer's facility, leading to inaccurate assessments and system downtime.
Innovation Solution
A system and method that uses a user interface device and a calculation unit to score the likelihood of particle occurrence factors based on particle distributions, allowing non-expert technicians to identify the factors through a user-friendly interface, including calculations for local contact, rubbing, gas hole penetration, crystal-originated particles, and chemical reactions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If particle occurrence factors are determined using conventional classification methods, then particle classification accuracy is improved, but the requirement for specialized knowledge increases, making the system harder to operate
Solution Approach 1:
An automated determination unit acts as an intermediary between particle classification results and occurrence factor determination. This unit automatically analyzes classified particles and determines occurrence factors without requiring technician expertise, thus maintaining high accuracy while improving ease of operation
Solution Approach 2:
The system performs self-service by automatically determining particle occurrence factors based on classified particle data. The determination unit autonomously processes classification results and generates occurrence factor determinations, eliminating the need for external expert technicians
2Measurement precision
If manufacturer technicians are deployed to determine particle occurrence factors, then determination accuracy is improved, but system downtime increases due to technician travel time
Solution Approach 1:
The substrate processing system performs self-diagnosis by automatically determining particle occurrence factors using its built-in determination unit. This eliminates the need to wait for manufacturer technicians to arrive, significantly reducing system downtime while maintaining accurate determination through automated analysis algorithms
Solution Approach 2:
The manual process of technician travel and physical assessment is replaced by an automated electronic determination system. The determination unit processes particle data electronically and instantly, substituting the mechanical process of technician deployment with a rapid automated system that eliminates travel time
3Measurement precision
If comprehensive particle testing is performed to identify occurrence factors, then determination accuracy is improved, but processing time and system complexity increase
Solution Approach 1:
Particle classification is performed in advance as a preliminary step, organizing particles by characteristics before occurrence factor determination. This pre-processing of data simplifies the subsequent determination process, maintaining accuracy while reducing the complexity of the overall system by structuring information beforehand
Data Source
AI summary
A system for determining occurrence factors of particles includes a user interface device, and an apparatus for detecting the occurrence factors of particles. The apparatus for detecting the occurrence factors of particles includes a storage unit that stores a program for executing a calculation method for calculating a likelihood of each of the occurrence factors of particles in the form of a score; and a calculation unit for calculating the score for each of the occurrence factors of particles based on particle distributions at least on a surface of a substrate using the stored program. The user interface device displays the calculated score for each of the occurrence factors of particles.