Charged Particle Irradiation Control for Adaptive Dose Timing
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Solution Overview
Problem
Conventional charged particle emission devices are unable to adaptively respond to changes in the charged state of an object or environment during operation, leading to inefficiencies and reduced yield.
Innovation Solution
A charged particle emission device equipped with a pre-emission state detection unit, emission time generation unit, post-emission state detection unit, machine learning unit, and completion determination unit, which iteratively learns to determine optimal emission times based on pre- and post-emission states, enabling adaptive particle emission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple particle beams are incident on the same location to improve processing speed, then productivity increases, but the location receives excessive irradiation dose which may cause damage
Solution Approach 1:
The patent divides the irradiation process into multiple passes, where different particle beams are incident on different locations in sequence. Each location receives irradiation from only one beam per pass, preventing excessive dose accumulation while maintaining high overall processing speed through continuous multi-beam operation.
Solution Approach 2:
The patent introduces a temporal dimension to the irradiation process by implementing multiple passes. The same location can be irradiated by different beams in different passes, allowing the system to achieve high productivity through multi-beam parallel processing while controlling the dose each location receives in any single pass.
2Adaptability or versatility
If the same location is irradiated by different particle beams, then processing coverage increases, but it becomes difficult to control the irradiation dose accurately
Solution Approach 1:
The patent performs preliminary planning of beam incident locations before actual irradiation. The control unit determines in advance which locations will be irradiated by which beams and in what sequence, ensuring that each location receives the intended dose while maintaining versatile processing coverage across different material types and geometries.
Solution Approach 2:
The patent implements a control unit that monitors and coordinates the irradiation process, tracking which locations have been irradiated by which beams. This feedback mechanism ensures accurate dose control by preventing locations from receiving unintended additional irradiation while maintaining flexible processing coverage.
3Productivity
If multiple particle beams are used simultaneously, then productivity increases, but the device complexity increases
Solution Approach 1:
The patent employs a single particle beam that can be directed to multiple locations through controlled movement, rather than requiring multiple separate beam sources. This universal approach maintains high productivity through multi-location processing while avoiding the complexity of multiple simultaneous beam generation systems.
Solution Approach 2:
The patent uses a dynamic control system that directs a single particle beam to different locations in sequence, creating the effect of multiple beams through temporal and spatial control. This dynamic approach achieves high productivity through rapid beam switching and positioning while keeping the physical device complexity manageable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device can quickly respond to changes in the charged object or environment, improving efficiency and yield by adaptively emitting charged particles.
Implementation Method 1
a particle beam 10B is incident on a target object 10T
Data Source
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AI summary
There is provided a charged particle emission device that can quickly respond to a change in a charged object or environment even during the operation of the device and can adaptively emit charged particles. There is provided a charged particle emission device that includes a pre-emission state detection unit configured to detect a pre-emission charged state which is a charged state of the charged object before charged particles are emitted, an emission time generation unit configured to generate an emission time based on a past emission time of charged particles and a charged state of the charged object after the emission, an emission unit configured to emit charged particles to the charged object which is in the pre-emission charged state based on the generated emission time, a post-emission state detection unit configured to detect a post-emission charged state which is a charged state of the charged object after the charged particles are emitted, a machine learning unit configured to cause a machine learning model to learn a correspondence among the pre-emission charged state, the post-emission charged state, and the emission time generated by the emission time generation unit, and a completion determination unit configured to repeatedly operate the pre-emission state detection unit, the emission time generation unit, the emission unit, the post-emission state detection unit, and the learning unit until the machine learning model satisfies a learning completion condition.