Particle Measurement Device for Prober Pad Surface Analysis
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional prober devices face inefficiencies in detecting and managing particles generated during wafer-level inspections, leading to unnecessary cleaning and reduced inspection efficiency due to the lack of accurate particle quantification and timely detection.
Innovation Solution
A particle measurement device that acquires pad surface shape data, detects a pad reference surface, calculates the volume of recessed and protruding portions, and quantifies particle quantity, enabling timely cleaning and improving inspection efficiency by outputting warnings when thresholds are exceeded.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the number of probing operations is used to determine cleaning timing, then the cleaning process is simplified, but particle detection accuracy deteriorates leading to unnecessary cleaning
Solution Approach 1:
The patent replaces the mechanical counting method (tracking number of probing operations) with an optical measurement system (light source, imaging device) to directly observe and quantify particles on the probe needle tip, achieving accurate particle detection without simplifying the cleaning decision process
Solution Approach 2:
The patent introduces an imaging device as an intermediary between the probe needle and the operator, capturing images of particles on the probe needle tip to provide objective visual evidence for cleaning decisions, thereby improving detection accuracy while maintaining operational simplicity
2Extent of automation
If cleaning is performed based on predetermined probing operation counts, then cleaning scheduling is automated, but inspection efficiency deteriorates due to timely cleaning not being performed
Solution Approach 1:
The patent implements a feedback mechanism where particles on the probe needle tip are continuously monitored through imaging, and cleaning is triggered based on actual particle accumulation rather than predetermined counts, ensuring cleaning is performed at the optimal moment to maintain inspection efficiency
Solution Approach 2:
The patent performs preliminary particle detection before significant particle accumulation occurs by continuously monitoring the probe needle tip, allowing cleaning to be scheduled proactively before it becomes necessary, thereby preventing efficiency degradation
3Device complexity
If particle detection is not implemented, then the measurement system is simpler, but particle management capability deteriorates
Solution Approach 1:
The patent introduces an imaging device as an intermediary to enable non-contact particle detection, adding minimal complexity to the measurement system while significantly improving particle management capability through visual verification and quantitative analysis
Solution Approach 2:
The patent replaces complex mechanical particle detection methods with optical imaging technology, simplifying the overall system structure while enhancing particle management capability through non-contact, high-precision measurement
Data Source
AI summary
The particle measurement device includes: an acquiring unit configured to acquire pad surface shape data indicating a surface shape of an electrode pad including a probe needle mark where a probe needle has contacted; a roughness calculating unit configured to calculate volume of a recessed portion recessed from a pad reference surface and volume of a protruding portion protruding from the pad reference surface based on the pad surface shape data; and a particle quantity calculating unit configured to calculate a particle quantity from a volume difference between the volume of the recessed portion and the volume of the protruding portion.