Particle Measuring Apparatus Dual Counters Ultrapure Water
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Solution Overview
Problem
Current particle measuring apparatuses for ultrapure water face challenges in achieving accurate and prompt measurement of particle numbers across various diameters, with light scattering liquid-borne particle counters (LPCs) experiencing high uncertainty and direct ophthalmoscopy requiring lengthy filtering processes.
Innovation Solution
A particle measuring apparatus comprising first and second particle counters with different counting efficiencies, where the first counter is optimized for small particle diameters and the second counter for larger diameters, along with particle number calculation means to determine particle counts for each diameter range, ensuring improved accuracy and prompt detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If a light scattering liquid-borne particle counter (LPC) with condensed laser beam is used to detect fine particles, then the ability to detect small particles (50 nm or less) is improved, but measurement accuracy deteriorates due to large uncertainty in particle concentration
Solution Approach 1:
The invention divides the particle measurement task into multiple segments by using multiple particle counters with different counting efficiencies. Each counter is optimized for different particle size ranges, and their results are combined through calculation means to achieve both fine particle detection capability and accurate concentration measurement.
Solution Approach 2:
The invention changes the parameter of counting efficiency by selecting particle counters with different characteristics. By using counters with varying counting efficiencies and combining their measurements through calculation, the system achieves both high detection sensitivity for fine particles and accurate concentration measurement.
2Measurement precision
If direct ophthalmoscopy with filter membrane is used to accurately evaluate particle number, then measurement accuracy is improved, but measurement time increases due to lengthy filtering process
Solution Approach 1:
The invention replaces the mechanical filtering process with optical detection using multiple particle counters. Instead of physically filtering particles through a membrane and then observing them, the system uses light scattering detection with counters of different counting efficiencies to directly measure particle numbers in various size ranges, eliminating the time-consuming filtering step while maintaining accuracy.
3Difficulty of detecting and measuring
If partial counting and light scattering LPC is used for fine particle detection, then detection capability for small particles is improved, but reliability deteriorates due to uncertainty in particle concentration measurement
Solution Approach 1:
The invention segments the measurement task by deploying multiple particle counters with different counting efficiencies. Each counter contributes to measuring particles in its optimal detection range, and the calculation means integrates these segmented measurements to produce a reliable overall particle concentration value, thereby improving reliability while maintaining fine particle detection capability.
Solution Approach 2:
The invention uses feedback by having calculation means process the measurement results from multiple particle counters with different counting efficiencies. The system cross-validates and integrates the data from each counter to compensate for individual limitations, thereby improving the reliability of particle concentration measurements while maintaining the ability to detect fine particles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances measurement accuracy and enables prompt detection of particle number changes in ultrapure water across all particle diameters, addressing the limitations of existing methods by utilizing counters with tailored efficiencies and calculation methods.
Implementation Method 1
a light scattering liquid-borne particle counter (LPC) that uses scattered light that is emitted from particles to be measured when the particles are irradiated by a laser beam
Data Source
AI summary
A particle measuring apparatus is provided that has improved measurement accuracy regardless of particle diameters and that ensures prompt measurement. A particle measuring apparatus has: first and second particle counters that obtain a number of particles that are contained in water that flows in a predetermined section of an ultrapure water production apparatus; and particle number calculation means that calculates the number of the particles that are contained in the water that flows in the predetermined section for each particle diameter range based on measurement results of the first and second particle counters. The first particle counter and the second particle counter have different counting efficiencies.