Particle-Optical Apparatus Transverse Magnetic Field Design
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Solution Overview
Problem
Conventional particle-optical systems face limitations in designing spatial dependencies and symmetries of magnetic and electric fields due to installation space constraints, restricting the flexibility in influencing particle beams.
Innovation Solution
A particle-optical apparatus using coils to produce significant magnetic fields oriented transversely to the beam direction, allowing for beam deflection and astigmatism modification at locations distant from the field-producing coils, thereby increasing design flexibility by creating magnetic deflection fields with maxima along the beam axis at distances from the coils.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional coils are used to produce magnetic fields for beam deflection, then the field strength is sufficient at the coil location, but the beam cannot be influenced at distant locations along the beam path
Solution Approach 1:
The patent transitions from conventional short-range magnetic field influence to long-range beam deflection by extending the interaction region along the beam axis. The magnetic field is designed to act over an extended distance (at least 0.05 times the maximum coil radius along the beam axis), enabling beam influence at locations far from the coil assembly and thus resolving the contradiction between field strength and influence distance.
2Adaptability or versatility
If multiple particle-optical apparatuses are assembled to achieve desired field spatial dependencies, then beam influence capability is improved, but installation space requirements increase
Solution Approach 1:
The patent combines multiple functions (beam deflection and astigmatism correction) into a single particle-optical apparatus with coils arranged to produce both dipole and quadrupole field components. This merging of functions reduces the number of separate apparatuses needed, thereby decreasing installation space while maintaining comprehensive beam influence capability.
Solution Approach 2:
The coil assembly is designed to generate multiple field configurations (dipole for deflection, quadrupole for astigmatism) simultaneously or independently, making the apparatus universal and capable of performing multiple beam manipulation tasks with a single device, thus reducing overall system space requirements.
3Adaptability or versatility
If conventional beam deflectors are used, then beam deflection is achieved at coil locations, but astigmatism correction and other beam modifications cannot be performed at distant locations
Solution Approach 1:
The patent employs independently controllable coil windings that can dynamically adjust the magnetic field configuration along the beam axis. By varying current in different coil windings, the system can switch between dipole mode for deflection and quadrupole mode for astigmatism correction at different positions, enabling dynamic beam modification at distant locations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the influence of particle beams in regions previously unreachable, enhancing the flexibility and effectiveness of particle-optical systems by allowing for adjustable beam deflection and astigmatism correction.
Implementation Method 1
coils to produce magnetic fields which are oriented transversely to a beam direction of a particle beam passing through the apparatus
Implementation Method 2
magnetic and/or electric fields for influencing the particle beams
Data Source
AI summary
A beam deflector includes a magnetic-flux-guiding structure which has an opening through which a beam axis extends, and at least two coils arranged at the magnetic-flux-guiding structure so that they produce a magnetic field B1 having lines passing through the two coils in succession, leave the magnetic-flux-guiding structure at a first location on a first side in relation to the beam axis, cross the beam axis at a second location which is arranged at a distance along the beam axis from the magnetic-flux-guiding structure, re-enter into the magnetic flux-guiding structure at a third location on a second side lying opposite the first side, and extend around the opening from the third location to the first location within the magnetic-flux-guiding structure.