Particle Optical Unit Control for Independent Imaging Parameter Adjustment
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Solution Overview
Problem
Existing particle beam systems face difficulties in setting the effects of particle-optical components to achieve desired imaging parameters such as imaging scale, convergence, and rotation, as changes in one component often affect multiple parameters, leading to complex interactions and challenges in achieving precise control.
Innovation Solution
A method and system for operating a particle optical unit with multiple components, where the effects of each component are set to achieve specific imaging parameters, and a mathematical mapping is determined to relate changes in component effects to changes in imaging parameters, allowing for independent control of imaging scale, rotation, and convergence, using a matrix to describe these relationships.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the focusing effect of one particle-optical lens is changed to adjust imaging scale, then the imaging scale changes, but the distance between imaged planes changes causing defocusing
Solution Approach 1:
The particle-optical unit is divided into multiple independently controllable particle-optical components (lenses), where each component's effect can be adjusted separately. This segmentation allows the focusing effect of one lens to be changed for imaging scale adjustment while other lenses compensate to maintain the distance between imaged planes, thus resolving the contradiction between imaging scale adaptability and focusing precision.
Solution Approach 2:
The invention changes the effects of multiple particle-optical components simultaneously by adjusting their respective parameters (electric/magnetic field strengths). By coordinating parameter changes across multiple lenses, the system achieves imaging scale adjustment without compromising focusing precision, as the combined effect of all lenses maintains the correct plane distance relationship.
2Manufacturing precision
If multiple particle-optical components are used to achieve desired imaging effects, then imaging quality improves, but the complexity of setting and coordinating component effects increases
Solution Approach 1:
The invention introduces a control mechanism that determines the effects of particle-optical components based on desired imaging parameters. This feedback approach automatically coordinates the settings of multiple components to achieve the desired imaging quality while simplifying the control process, as the system self-adjusts to maintain optimal performance across all lenses.
Solution Approach 2:
The particle-optical unit is designed with multiple lenses that can each serve multiple functions depending on their adjustment. By making each component multi-functional and coordinating their effects, the system achieves high imaging quality without proportionally increasing control complexity, as the same set of lenses handles multiple imaging requirements simultaneously.
3Adaptability or versatility
If particle-optical imaging parameters are changed to achieve desired imaging scale and rotation, then imaging flexibility improves, but the convergence of beam path may be affected
Solution Approach 1:
The particle-optical unit segments the imaging function across multiple lenses, allowing independent adjustment of imaging parameters (scale, rotation) while maintaining beam path convergence. Each lens contributes to specific aspects of the imaging, enabling parameter changes without compromising the overall convergence of the beam path to the image plane.
Solution Approach 2:
The invention coordinates parameter changes across multiple particle-optical components to simultaneously achieve desired imaging scale, rotation, and beam path convergence. By adjusting the effects of multiple lenses in a coordinated manner, the system changes imaging parameters while maintaining the precision of beam path convergence to the image plane.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise control over imaging parameters, allowing for telecentric imaging and independent adjustment of imaging scale and rotation without affecting convergence, improving the accuracy and flexibility of particle beam systems in applications like electron microscopes and lithography.
Implementation Method 1
the particle-optical components provide electric and/or magnetic fields which act on the charged particles of the particle beam
Implementation Method 2
the particle-optical components provide electric and/or magnetic fields which act on the charged particles of the particle beam
Implementation Method 3
the particle-optical component can be a particle-optical lens, which has a focusing effect on the particle beam
Implementation Method 4
the particle-optical component can be a particle-optical lens, which has a focusing effect on the particle beam
Data Source
AI summary
A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.