Charged Particle Optics Standby Cooling for Lower Idle Power

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Solution Overview

Problem

Charged particle beam microscopy systems face high power consumption due to the need for continuous operation to maintain temperature stability and performance, leading to significant energy usage even when idle, which is not practical to shut down without causing thermal drifts and misalignments.

Innovation Solution

Implementing a standby mode that reduces power consumption by stabilizing the temperature of charged particle optics elements using a lower current and minimizing cooling, allowing for quicker stabilization when returning to operating mode.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If the charged particle system operates continuously in operating mode to maintain temperature stability, then thermal stability and performance are improved, but power consumption increases significantly

Engineering Contradiction:
Improvetemperature stabilityVSAvoidpower consumption
Core Design Contradiction:
Stability of the object's compositionVSUse of energy by moving object

Solution Approach 1:

The system dynamically switches between operating mode and standby mode based on usage requirements. In standby mode, the cooling assembly operates at reduced capacity and optics elements receive reduced current, allowing power consumption to be minimized while maintaining sufficient thermal stability for subsequent operation.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system changes operational parameters when transitioning to standby mode: cooling power is reduced, optics element currents are reduced, and temperature setpoints may be adjusted. These parameter changes enable power savings while maintaining the system in a state that can quickly return to full operation.

Inventive Principle:
Principle #35Parameter changes

2Use of energy by moving object

If the charged particle system is shut down to save power, then power consumption is reduced, but thermal drifts and misalignments occur

Engineering Contradiction:
Improvepower consumptionVSAvoidthermal stability
Core Design Contradiction:
Use of energy by moving objectVSStability of the object's composition

Solution Approach 1:

Instead of completely shutting down the system, the standby mode applies partial action by maintaining reduced-level cooling and reduced-level optics currents. This partial maintenance of operational state prevents thermal drifts and misalignments while consuming significantly less power than full operation.

Inventive Principle:
Principle #16Partial or excessive action

3Stability of the object's composition

If full cooling is applied to maintain temperature stability, then thermal stability is improved, but power consumption increases

Engineering Contradiction:
Improvetemperature stabilityVSAvoidcooling power
Core Design Contradiction:
Stability of the object's compositionVSUse of energy by stationary object

Solution Approach 1:

The cooling assembly dynamically adjusts its operation between full cooling in operating mode and reduced cooling in standby mode. This dynamic adjustment allows the system to maintain adequate thermal stability during idle periods while minimizing the power consumed by the cooling system.

Inventive Principle:
Principle #15Dynamics

4Reliability

If optics elements are powered at full current to maintain performance, then system performance is improved, but power consumption increases

Engineering Contradiction:
Improvesystem performanceVSAvoidoptics power
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

In standby mode, the optics elements are powered at reduced current levels rather than full operating current. This partial powering maintains sufficient performance for system readiness and quick transition to full operation, while significantly reducing the power consumed by the optics system during idle periods.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Significantly reduces power consumption by at least 33% to 50% during standby mode while maintaining thermal stability, enabling faster system readiness when switching back to operating mode without the need for prolonged stabilization.

Implementation Method 1

a cooling assembly configured for cooling the at least one charged particle optics element

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

active cooling is typically provided to thermally stabilize the system

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

These systems require currents on the order of a few amperes, e.g., in the range of 1-20 A, which, owing to the wire resistance, also introduce significant heat to the system

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 4

Such charged particle optics are generally based on electric and magnetic fields acting on the charged particles

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 5

In particular electromagnetic lenses may comprise at least one electromagnetic coil also referred to as electromagnet or simply coil

Methodology Applied
Scientific EffectElectromagnetism: Electromagnet

Implementation Method 6

charged particle optics may induce thermal drifts due to thermal expansion and contraction of different components of the system

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentEP4354484A1Reduction of power comsumption for a charged particle system
Publication Date: 2024.04.17 FEI CO
  • EP4354484A1 patent drawingFigure 1a~1b
  • EP4354484A1 patent drawingFigure 2a~2b
  • EP4354484A1 patent drawingFigure 3~4

AI summary

The present invention relates to a method for reducing the power consumption of a charged particle system, the charged particle system comprising at least one charged particle optics element and a cooling assembly configured for cooling the at least one charged particle optics element, the method comprising the steps of running the charged particle system in a standby mode, wherein the total power consumption of the charged particle system is reduced compared to running the charged particle system in an operating mode. Furthermore, the present invention relates to a respective charged particle system.