Automated Particle Removal System for CMOS Sensors
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Solution Overview
Problem
Manual removal of foreign particles from CMOS sensor surfaces is slow, laborious, and risks damaging the fragile surfaces, as existing automated methods lack precise force control to differentiate between particle pickup and surface damage.
Innovation Solution
An automated system using a tool gripper and force sensing device to determine and apply a threshold force for particle removal, ensuring the force is sufficient to pick up particles without damaging the surface, employing a gel stick with a force/pressure transducer to monitor and control the cleaning force.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual removal of foreign particles is performed using a tool, then foreign particles can be removed from the CMOS sensor surface, but the CMOS sensor surface may be damaged due to contact with the tool
Solution Approach 1:
The patent implements a feedback mechanism using a force sensing device that continuously monitors the contact force between the particle removal tool and the CMOS sensor surface. When the measured force exceeds a predetermined threshold, the system automatically adjusts the tool's position or force application to prevent surface damage while maintaining particle removal capability
Solution Approach 2:
The patent replaces direct mechanical contact with a more controlled system that uses force sensing and automated control. Instead of relying on manual operator skill to apply appropriate force, the system uses sensors and automation to precisely control the interaction between the tool and sensor surface, reducing the risk of damage
2Extent of automation
If automated particle removal is implemented without force monitoring, then manual intervention is eliminated and processing speed increases, but the risk of inadvertent damage to the CMOS sensor surface increases
Solution Approach 1:
The automated system incorporates real-time feedback through force sensing devices that monitor contact forces during particle removal. This feedback loop enables the automated system to detect and respond to potential damage conditions, maintaining both high automation and surface integrity
Solution Approach 2:
The system performs preliminary calibration to determine the threshold force that safely removes particles without damaging the sensor surface. This pre-established threshold is then used during automated operation to prevent damage, enabling reliable automated particle removal
3Productivity
If manual inspection and removal processes are used, then particle removal can be performed, but the process is slow and laborious
Solution Approach 1:
The system enables self-service automated particle removal where the automated optical inspection machine identifies particles and the controlled force application system removes them without requiring manual operator intervention for each particle, significantly reducing time consumption while maintaining effectiveness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system automates the removal of foreign particles from CMOS sensors with precise force control, preventing damage and enhancing the efficiency and consistency of the process, allowing for safe and effective removal of particles from fragile surfaces.
Implementation Method 1
determining with a force sensing device a cleaning position of the particle removal tool relative to the surface whereat a threshold force is exerted on the surface
Data Source
AI summary
A foreign particle removal system for removing a particle from a surface of a fragile object has a tool gripper which grips a particle removal tool. A force sensing device determines a cleaning position of the particle removal tool relative to the surface whereat a threshold force is exerted on the surface, the threshold force being a force that is exerted by the particle removal tool on the surface that would pick up the foreign particle but would not damage the object. The particle removal tool is conveyed over a location of the foreign particle and is moved towards the surface to the cleaning position whereat the threshold force is exerted on the surface. The particle removal tool is then lifted away from the surface together with the foreign particle.