Partitioned Crucible for Uniform OLED Evaporation
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Solution Overview
Problem
In the deposition process for OLED displays, the non-uniform evaporation of deposition materials due to quantitative and temperature deviations within the crucible leads to uneven layer formation on substrates, potentially causing substrate deformation and non-uniformity in the display layers.
Innovation Solution
A linear evaporation source with a crucible divided by partitions, each having through-holes in the lower portion, is used, along with a nozzle section and heating mechanism, to ensure uniform evaporation and minimize quantitative deviations, allowing for uniform layer formation on substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the crucible is not divided by partitions, then the device structure is simple, but quantitative deviation between deposition materials remains high causing non-uniform layer formation
Solution Approach 1:
The crucible is divided into multiple compartments by partitions, each compartment containing a separate deposition material. This segmentation allows independent control and uniform evaporation of each material, resolving the contradiction by improving layer uniformity through structural division while maintaining reasonable device complexity.
2Stability of the object's composition
If the crucible is heated uniformly, then energy efficiency is improved, but temperature deviations within the crucible persist causing non-uniform evaporation
Solution Approach 1:
Different regions of the crucible (each compartment) are heated with locally optimized conditions through the heating means positioned to provide uniform heat distribution across all partitions. This allows each deposition material to experience appropriate temperature conditions for uniform evaporation while maintaining overall energy efficiency.
3Manufacturing precision
If deposition is performed without partitions, then the deposition process is fast, but quantitative deviation causes non-uniform layer formation
Solution Approach 1:
The partitioned crucible structure enables simultaneous deposition of multiple materials in separate compartments, each achieving uniform evaporation. This segmentation improves layer uniformity while maintaining productivity by allowing parallel processing of multiple deposition materials without sequential operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures uniform deposition of materials, preventing substrate deformation and achieving consistent layer formation in OLED displays, thereby enhancing the manufacturing efficiency and quality of flat panel displays.
Implementation Method 1
a deposition material is evaporated or sublimated
Implementation Method 2
a means for heating the crucible
Implementation Method 3
deposited under vacuum
Data Source
AI summary
A linear evaporation source and a deposition apparatus having the same are disclosed. In one aspect, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.